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Capacitive acceleration sensor

  • US 20040216523A1
  • Filed: 02/10/2004
  • Published: 11/04/2004
  • Est. Priority Date: 02/11/2003
  • Status: Active Grant
First Claim
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1. A capacitive acceleration sensor comprising at least one pair of electrodes such, that each pair of electrodes comprises a movable electrode, which is responsive to the acceleration, and at least one stationary plate portion, wherein each pair of electrodes further comprises an axis of rotation essentially forming a common axis such, that the movable electrode of the acceleration sensor is rigidly supported at the axis of rotation such, that the movable electrode is free to turn in a rotational motion about the axis of rotation, and that several pairs of electrodes are used in the acceleration sensor.

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