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Sensor device having a magnetostrictive force sensor

  • US 20040216534A1
  • Filed: 04/29/2004
  • Published: 11/04/2004
  • Est. Priority Date: 04/29/2003
  • Status: Active Grant
First Claim
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1. A sensor device for detecting a force that acts in a prescribed direction of force, comprising:

  • a tunnel-magnetoresistive sensor element, as a force sensor element, which is provided with a thin layer system comprising;

    a detection layer of magnetic material having a magnetostriction coefficient λ

    , where λ



    |5.10

    6
    |;

    a comparatively magnetically harder reference layer or a corresponding reference layer system;

    an intermediate layer of insulating material, as a tunnel barrier, disposed between said detection layer and said reference layer or layer system; and

    electrical connections on said reference layer or reference layer system and on said detection layer, wherein in said detection layer a starting magnetization is established that relative to a magnetization of said reference layer or reference layer system, which is directed at least approximately in the direction of force, forms an angle of other than 0°

    , so that said starting magnetization of said detection layer is rotated out of a starting position under the effect of the force.

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