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Multi-stable micro electromechanical switches and methods of fabricating same

  • US 20040216988A1
  • Filed: 04/29/2003
  • Published: 11/04/2004
  • Est. Priority Date: 04/29/2003
  • Status: Active Grant
First Claim
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1. A micro electromechanical switch formed on a substrate, the switch having a moveable member configured to electrically cooperate with a receiving terminal, and wherein the moveable member and the receiving terminal each comprise:

  • an insulating layer proximate to the substrate; and

    a conducting layer proximate to the insulating layer opposite the substrate and having a protruding region extending radially outward from the substrate;

    and wherein the protruding region of the moveable member is configured to switchably engage and disengage the protruding region of the receiving terminal to thereby toggle the micro electromechanical switch between an open state and a closed state.

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