Packaged micromirror array for a projection display
First Claim
1. A packaged micromirror array for a projection display, comprising:
- array of micromirrors that are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on a target; and
wherein each micromirror corresponds to a pixel in a viewed image on the target;
a package having a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window;
a rectangular mask disposed on or above the micromirror array;
wherein each micromirror has a single convex protrusion in the direction of a side of the rectangular array and has no substantial sides parallel to said side of the rectangular array;
wherein a horizontal row of micromirrors extends corner to corner in the row parallel to a side of the rectangular array, and wherein vertical lines corresponding to addressing columns extend from each micromirror in the row and connect to every other row of micromirrors; and
wherein a vertical column of micromirrors extends corner to corner in the column parallel to a side of the rectangular array, and wherein horizontal lines corresponding to addressing rows extend from each micromirror in the column and connect to every other column of micromirrors
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Accused Products
Abstract
In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.
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Citations
48 Claims
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1. A packaged micromirror array for a projection display, comprising:
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array of micromirrors that are capable of movement between an OFF state and an ON state by pulse width modulation to achieve a gray scale image on a target; and
wherein each micromirror corresponds to a pixel in a viewed image on the target;
a package having a light transmissive window, wherein the array of micromirrors is disposed in the package having the light transmissive window;
a rectangular mask disposed on or above the micromirror array;
wherein each micromirror has a single convex protrusion in the direction of a side of the rectangular array and has no substantial sides parallel to said side of the rectangular array;
wherein a horizontal row of micromirrors extends corner to corner in the row parallel to a side of the rectangular array, and wherein vertical lines corresponding to addressing columns extend from each micromirror in the row and connect to every other row of micromirrors; and
wherein a vertical column of micromirrors extends corner to corner in the column parallel to a side of the rectangular array, and wherein horizontal lines corresponding to addressing rows extend from each micromirror in the column and connect to every other column of micromirrors - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification