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Method of adding mass to MEMS structures

  • US 20040219340A1
  • Filed: 04/29/2003
  • Published: 11/04/2004
  • Est. Priority Date: 04/29/2003
  • Status: Active Grant
First Claim
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1. A proof mass for a MEMS device, comprising:

  • a base comprising a first material; and

    at least one appendage adjoined to said base by way of a stem, said appendage comprising a second material which is denser than said first material.

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