Method and apparatus for processing samples

• US 20040219687A1
• Filed: 05/27/2004
• Published: 11/04/2004
• Est. Priority Date: 02/27/1989
• Status: Active Grant

• Current Assignee: Hironobu Kawahara, Kazuo Nojiri, Ryooji Fukuyama, Yoshiaki Sato, Yoshimi Torii, Yoshinao Kawasaki
• Original Assignee: Hironobu Kawahara, Kazuo Nojiri, Ryooji Fukuyama, Yoshiaki Sato, Yoshimi Torii, Yoshinao Kawasaki
• Inventors: Kawasaki, Yoshinao, Sato, Yoshiaki, Nojiri, Kazuo, Torii, Yoshimi, Fukuyama, Ryooji, Kawahara, Hironobu
• Granted Patent: US 7,132,293 B2
• Time in Patent Office: Days
• US Class Current: 436/174
• CPC Class Codes: H01L 21/02071 the processing being a delineation, e.g. RIE, of conductive layers
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67173 in-line arrangement
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: Y10S 438/963 Removing process residues from vertical substrate surfaces
• CPC Class Codes: Y10T 436/11 Automated chemical analysis
• CPC Class Codes: Y10T 436/25 including sample preparation
• CPC Class Codes: Y10T 436/2575 Volumetric liquid transfer

Abstract

Disclosed is apparatus for treating samples, and a method of using the apparatus. The apparatus includes processing apparatus (a) for treating the samples (e.g., plasma etching apparatus), (b) for removing residual corrosive compounds formed by the sample treatment, (c) for wet-processing of the samples and (d) for dry-processing the samples. A plurality of wet-processing treatments of a sample can be performed. The wet-processing apparatus can include a plurality of wet-processing stations. The samples can either be passed in series through the plurality of wet-processing stations, or can be passed in parallel through the wet-processing stations.

Claims

1. A method for processing a sample in plural processing chambers under a reduced pressure, the sample being passed through a buffer chamber under a reduced pressure, wherein said buffer chamber and said processing chambers are put in communication with, and cut off from, each other, comprising steps of:

moving a first sample scooping member arranged in said buffer chamber to one processing chamber, said buffer chamber and said one processing chamber being under reduced pressure;

taking out a processed sample from said one processing chamber, and also transferring said processed sample to another processing chamber, by said first sample scooping member, wherein said processed sample is transferred to said another processing chamber by rotary motion of said first sample scooping member, and wherein said taking out the processed sample from said one processing chamber includes sub-steps, after processing the sample, of delivering the processed sample from a sample delivery member of a sample table, within the one processing chamber, to said first sample scooping member, and taking the first sample scooping member, supporting the sample, out of said one processing chamber; and

transferring a sample, which has been brought into said buffer chamber, to said one processing chamber, in which said processed sample has been taken out, by a second sample scooping member arranged in said buffer chamber, said second sample scooping member being in addition to the first sample scooping member.

2. The method according to claim 1, wherein said second sample scooping member can move without movement of said first sample scooping member.

3. The method according to claim 1, wherein said processed sample is transferred from said one processing chamber to said another processing chamber passing through said buffer chamber.

4. The method according to claim 3, wherein said processed sample passes only through said buffer chamber in being transferred from said one processing chamber to said another processing chamber.

5. The method according to claim 1, wherein said processed sample is taken out from said one processing chamber, and is also transferred to said another processing chamber, using only said first sample scooping member for the taking out and for the transfer.

6. The method according to claim 1, wherein in said moving step, said first sample scooping member enters said one processing chamber after said one processing chamber has completed processing of said sample.

7. The method according to claim 6, wherein said processed sample is transferred from said one processing chamber to said another processing chamber passing through said buffer chamber.

8. The method according to claim 1, wherein said moving step includes moving said first sample scooping member into said one processing chamber, and wherein during said moving step said buffer chamber and said one processing chamber are in communication with each other.

9. The method according to claim 1, wherein said processed sample is transferred from said one processing chamber to said another processing chamber by said rotary motion of said first sample scooping member.

10. The method according to claim 9, wherein said processed sample is transferred from said one processing chamber to said another processing chamber by only said rotary motion of said first sample scooping member.

11. The method according to claim 9, wherein said first sample scooping member is a single member that transfers said processed sample from said one processing chamber to said another processing chamber.

12. The method according to claim 1, wherein said first sample scooping member is a single member that transfers said processed sample to said another processing chamber.

13. An apparatus for processing a sample under reduced pressure, comprising:

plural processing chambers for processing said sample under a reduced pressure;

a buffer chamber under a reduced pressure;

barrier structure enabling said buffer chamber and said processing chambers to be in communication with, and be cut off from, each other;

a first sample scooping member arranged in said buffer chamber and adapted to perform rotary motion such that, after processing said sample in one processing chamber, of the plural processing chambers, the first sample scooping member can rotationally move to said one processing chamber and take out a processed sample from said one processing chamber, and can also rotationally move from said one processing chamber to another processing chamber to transfer said processed sample to said another processing chamber, of the plural processing chambers;

a second sample scooping member, in addition to the first sample scooping member, arranged in said buffer chamber, and which is adapted to transfer a sample, which has been brought in said buffer chamber, to said one processing chamber, from which said processed sample has been taken out; and

a sample table in said one processing chamber, said sample table including a sample delivery member, and wherein said first sample scooping member and said sample delivery member are movable relative to each other such that a processed sample can be delivered from the sample delivery member to the first sample scooping member.

14. The apparatus according to claim 13, wherein said second sample scooping member can move without movement of said first sample scooping member.

15. The apparatus according to claim 13, wherein said first sample scooping member is adapted to transfer the sample from said one processing chamber to said another processing chamber through said buffer chamber.

16. The apparatus according to claim 15, wherein said first sample scooping member is adapted to transfer the sample from said one processing chamber to said another processing chamber only through said buffer chamber.

17. The apparatus according to claim 13, wherein said sample delivery member is adapted to move up and down relative to the first sample scooping member, when the processed sample is delivered therefrom to the first sample scooping member.

18. The apparatus according to claim 13, wherein said first sample scooping member is a single member that can rotationally move from said one processing chamber to said another processing chamber to transfer said processed sample from said one processing chamber to said another processing chamber.

19. The apparatus according to claim 18, wherein said first sample scooping member is adapted to rotationally move such that in transferring said processed sample from said one processing chamber to said another processing chamber the motion by said first sample scooping member is only rotary motion.

20. The apparatus according to claim 13, wherein said first sample scooping member is adapted to rotationally move such that in transferring said processed sample from said one processing chamber to said another processing chamber the motion by said first sample scooping member is only rotary motion.