Etching methods, RIE methods, and methods of increasing the stability of photoresist during RIE
First Claim
1. An etching method comprising:
- applying a photoresist over a substrate, the photoresist having a composition sensitized to an actinic energy wavelength of 248 nm or less;
forming an opening in the photoresist; and
etching the substrate under the opening using a plasma generated with a gas composition comprising argon and an amount of higher atomic mass inert gas, the amount being effective to increase photoresist stability compared to otherwise identical etching lacking any of the higher atomic mass inert gas.
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Abstract
An etching method includes applying a photoresist over a substrate, forming an opening in the photoresist, and etching the substrate under the opening using a plasma generated with a gas composition containing argon and an amount of higher atomic mass inert gas. The amount may be effective to increase photoresist stability compared to otherwise identical etching lacking any of the higher atomic mass inert gas. The photoresist may have a composition sensitized to an actinic energy wavelength of 248 nm or less. A method of increasing the stability of 248 nm or less photoresist during RIE includes providing a means for reducing electron temperature of a plasma and etching a substrate exposed through photoresist openings without substantially destabilizing the photoresist.
26 Citations
43 Claims
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1. An etching method comprising:
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applying a photoresist over a substrate, the photoresist having a composition sensitized to an actinic energy wavelength of 248 nm or less;
forming an opening in the photoresist; and
etching the substrate under the opening using a plasma generated with a gas composition comprising argon and an amount of higher atomic mass inert gas, the amount being effective to increase photoresist stability compared to otherwise identical etching lacking any of the higher atomic mass inert gas. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An etching method comprising:
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applying a photoresist over a substrate, the photoresist having a composition sensitized to an actinic energy wavelength of 248 nm or less;
forming an opening in the photoresist; and
etching the substrate under the opening using a plasma generated with a gas composition comprising an amount of at least one of xenon and krypton, the amount being effective to increase photoresist stability compared to otherwise identical etching using argon or lower atomic mass noble gas in place of the at least one of xenon and krypton. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A reactive ion etching method comprising:
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applying a photoresist over a substrate, the photoresist having a composition sensitized to an actinic energy wavelength of 248 nm or less;
exposing a selected portion of the photoresist to actinic energy having a wavelength of 248 nm or less;
developing the photoresist and forming a plurality of openings through the photoresist; and
etching the substrate under the plurality of openings using a plasma generated from a gas composition comprising argon and an amount of at least one of xenon and krypton, the amount being effective to increase photoresist stability compared to otherwise identical etching lacking xenon and krypton. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32)
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33. A method of increasing the stability of 248 nm or less photoresist during RIE comprising:
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forming developed 248 nm or less photoresist on a substrate, the photoresist having openings therethrough;
providing a first inert gas composition in a RIE chamber, the first composition consisting of components having an atomic mass less than or equal to argon;
providing a reactive gas in the RIE chamber;
forming a plasma in the RIE chamber using at least the first composition and applying power density of at least 5 W/cm2;
providing a means for reducing electron temperature of the plasma; and
etching the substrate exposed through the openings using the plasma and the reactive gas without substantially destabilizing the photoresist. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification