Method and apparatus for treating article to be treated
First Claim
1. A method of processing an object, to be processed, comprising the steps of:
- loading the object contaminated with an organic substance into a reaction chamber; and
heating the reaction chamber at a predetermined temperature and supplying a processing gas into the reaction chamber, thereby removing the organic substance from the object;
wherein the processing gas contains an oxidizing gas and a reducing gas, and the predetermined temperature at which the reaction chamber is heated is high enough to activate the oxidizing gas and the reducing gas.
1 Assignment
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Accused Products
Abstract
A thermal treatment apparatus 1 includes a reaction tube 2 for containing wafers 10 contaminated with organic substances having a heater 12 capable of heating the reaction tube; a first gas supply pipe 13 for carrying oxygen gas into the reaction tube 2; and a second gas supply pipe 14 for carrying hydrogen gas into the reaction tube 2. Oxygen gas and hydrogen gas are supplied through the first gas supply pipe 13 and the second gas supply pipe 14, respectively, into the reaction tube 2, and the heater 12 heats the reaction tube 2 at a temperature capable of activating oxygen gas and hydrogen gas. A combustion reaction occurs in the reaction tube 2 and thereby the organic substances adhering to the wafers 10 are oxidized, decomposed and removed.
423 Citations
29 Claims
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1. A method of processing an object, to be processed, comprising the steps of:
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loading the object contaminated with an organic substance into a reaction chamber; and
heating the reaction chamber at a predetermined temperature and supplying a processing gas into the reaction chamber, thereby removing the organic substance from the object;
wherein the processing gas contains an oxidizing gas and a reducing gas, and the predetermined temperature at which the reaction chamber is heated is high enough to activate the oxidizing gas and the reducing gas. - View Dependent Claims (2, 3, 4, 5)
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6. A processing apparatus for processing an object, to be processed, comprising:
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a reaction chamber, for containing the object, provided with a heating unit capable of heating the reaction chamber at a predetermined temperature;
a gas supplying means for supplying a processing gas containing an oxidizing gas and a reducing gas into the reaction chamber;
a gas discharging means for discharging gases from the reaction vessel; and
a control means for controlling the heating unit so as to heat the reaction chamber at a temperature high enough to activate the oxidizing gas and the reducing gas. - View Dependent Claims (7, 8, 9, 10)
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11. A method of processing an object, to be processed, comprising the steps of:
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loading the object contaminated with an organic substance into a reaction chamber; and
heating the reaction chamber at a predetermined temperature and supplying a processing gas into the reaction chamber, thereby removing the organic substance from the object;
wherein the processing gas contains ozone, and the temperature of the heated reaction chamber is high enough to activate the ozone contained in the processing gas. - View Dependent Claims (12, 13, 14, 15, 16, 26, 27, 28)
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17. A processing apparatus for processing an object, to be processed, comprising:
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a reaction chamber for containing the object, and provided with a heating unit capable of heating the reaction chamber at a predetermined temperature;
a processing gas supplying means for supplying a processing gas containing ozone into the reaction chamber;
a gas discharging means for discharging gases from the reaction vessel; and
a control means for controlling the heating unit so as to heat the reaction chamber at a temperature high enough to activate the ozone contained in the processing gas. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 29)
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Specification