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Method and apparatus for treating article to be treated

  • US 20040219793A1
  • Filed: 06/16/2004
  • Published: 11/04/2004
  • Est. Priority Date: 12/05/2000
  • Status: Active Grant
First Claim
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1. A method of processing an object, to be processed, comprising the steps of:

  • loading the object contaminated with an organic substance into a reaction chamber; and

    heating the reaction chamber at a predetermined temperature and supplying a processing gas into the reaction chamber, thereby removing the organic substance from the object;

    wherein the processing gas contains an oxidizing gas and a reducing gas, and the predetermined temperature at which the reaction chamber is heated is high enough to activate the oxidizing gas and the reducing gas.

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