Method and system of dynamic learning through a regression-based library generation process
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Accused Products
Abstract
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.
32 Citations
82 Claims
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1-70. -70:
- (Canceled).
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71. :
- A method of determining a profile, comprising;
receiving a set of measurements associated with an actual signal;
searching a profile library for a closest matching set of trial parameter values, wherein the set of trial parameter values is associated with a trial signal;
determining whether the trial signal satisfies a goodness of fit threshold;
if the trial signal satisfies the threshold, displaying the closest matching set of trial parameter values; and
if the trial signal does not satisfy the threshold, generating a new trial signal using the set of trial parameter values and storing the new trial signal in the profile library. - View Dependent Claims (72, 73, 74)
- A method of determining a profile, comprising;
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75. :
- A computer program product for use in determining a profile, said computer program product comprising;
a computer usable medium including computer readable program code embodied in said medium for causing determining the profile;
computer readable program code for causing a computer to effect receiving a set of measurements associated with an actual signal;
computer readable program code for causing said computer to effect searching a profile library for a closest matching set of trial parameter values, wherein the set of trial parameter values is associated with a trial signal;
computer readable program code for causing said computer to effect determining whether the trial signal satisfies a goodness of fit threshold;
if the trial signal satisfies the threshold, computer readable program code for causing said computer to effect displaying the closest matching set of trial parameter values; and
if the trial signal does not satisfy the threshold, computer readable program code for causing said computer to effect generating a new trial signal using the set of trial parameter values and storing the new trial signal in the profile library. - View Dependent Claims (77, 79, 81)
- A computer program product for use in determining a profile, said computer program product comprising;
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76. :
- An article of manufacture comprising;
a computer usable medium including computer readable program code embodied therein for causing determining a profile, the computer readable program code in said article of manufacture comprising;
computer readable program code for causing a computer to effect receiving a set of measurements associated with an actual signal;
computer readable program code for causing said computer to effect searching a profile library for a closest matching set of trial parameter values, wherein the set of trial parameter values is associated with a trial signal;
computer readable program code for causing said computer to effect determining whether the trial signal satisfies a goodness of fit threshold;
if the trial signal satisfies the threshold, computer readable program code for causing said computer to effect displaying the closest matching set of trial parameter values; and
if the trial signal does not satisfy the threshold, computer readable program code for causing said computer to effect generating a new trial signal using the set of trial parameter values and storing the new trial signal in the profile library. - View Dependent Claims (78, 80, 82)
- An article of manufacture comprising;
Specification