Angular rate sensor using micro electromechanical haltere
First Claim
1. An apparatus for sensing angular motion, the apparatus comprising a body;
- a rod movably coupled to the body;
an actuator for producing a movement coupled to the rod; and
a sensor for sensing a bending of the rod in response to a rotational movement of the body.
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Accused Products
Abstract
An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is coupled is sensed with a resistive strain gage. In a first embodiment the haltere is actuated (i.e., made to beat or sweep) by simple coupling to an actuator. In a second embodiment, a four-bar structure is used to amplify the motion of a piezoelectric bender to cause haltere beating. Another embodiment achieves haltere beating by parasitic transmission of vibrations of the MFI body to the base of the haltere.
13 Citations
20 Claims
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1. An apparatus for sensing angular motion, the apparatus comprising
a body; -
a rod movably coupled to the body;
an actuator for producing a movement coupled to the rod; and
a sensor for sensing a bending of the rod in response to a rotational movement of the body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for sensing angular motion in a micromechanical device, the apparatus comprising
a rod; -
means for producing a sweeping movement of the rod;
means for sensing a bending of the rod in response to a rotational movement of the rod.
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11. An apparatus modeled after an insect'"'"'s haltere for sensing angular velocity in a flying machine.
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12. A method for detecting body rotation, the method comprising
detecting a coriolis force on a rod coupled to the body; - and
transforming the detected coriolis force into an angular rate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification