×

Angular rate sensor using micro electromechanical haltere

  • US 20040221648A1
  • Filed: 05/03/2004
  • Published: 11/11/2004
  • Est. Priority Date: 05/10/2003
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus for sensing angular motion, the apparatus comprising a body;

  • a rod movably coupled to the body;

    an actuator for producing a movement coupled to the rod; and

    a sensor for sensing a bending of the rod in response to a rotational movement of the body.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×