Photovoltaic element and method of forming photovoltaic element
First Claim
1. A photovoltaic element formed on a substrate, comprising a first semiconductor layer and a second semiconductor layer containing crystalline silicon of at least different conductivity types and/or shapes from each other, wherein an amorphous intermediate layer is arranged between the first semiconductor layer and the second semiconductor layer.
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Abstract
The present invention provides a photovoltaic element including a structure with a first pin-junction having an i-type semiconductor layer made of amorphous silicon and a second pin-junction having an i-type semiconductor layer contains crystalline silicon which are arranged in series on a substrate, wherein the first pin-junction has a first intermediate layer at a p/i interface and a second intermediate layer at an n/i interface, and the second pin-junction has a third intermediate layer at a p/i interface and a fourth intermediate layer at an n/i interface, and wherein the second intermediate layer and the third intermediate layer are made of amorphous silicon and the first intermediate layer and the fourth intermediate layer contain crystalline silicon, or wherein the second intermediate layer and the third intermediate layer contain crystalline silicon and the first intermediate layer and the fourth intermediate layer are made of amorphous silicon.
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Citations
19 Claims
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1. A photovoltaic element formed on a substrate, comprising a first semiconductor layer and a second semiconductor layer containing crystalline silicon of at least different conductivity types and/or shapes from each other,
wherein an amorphous intermediate layer is arranged between the first semiconductor layer and the second semiconductor layer.
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3. A photovoltaic element comprising a structure with a first pin-junction having an i-type semiconductor layer made of amorphous silicon and a second pin-junction having an i-type semiconductor layer containing crystalline silicon which are arranged in series on a substrate,
wherein the first pin-junction has a first intermediate layer at a p/i interface and a second intermediate layer at an n/i interface, and the second pin-junction has a third intermediate layer at a p/i interface and a fourth intermediate layer at an n/i interface, wherein the second intermediate layer and the third intermediate layer are made of amorphous silicon and the first intermediate layer and the fourth intermediate layer contain crystalline silicon, or the second intermediate layer and the third intermediate layer contain crystalline silicon and the first intermediate layer and the fourth intermediate layer are made of amorphous silicon.
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4. A photovoltaic element comprising a structure with a first pin-junction having an i-type semiconductor layer made of amorphous silicon and a second pin-junction having an i-type semiconductor layer made of crystalline silicon which are arranged in series on a substrate,
wherein the first pin-junction has a first intermediate layer containing crystalline silicon at an interface on an incident light side of the i-type semiconductor layer and a second intermediate layer containing amorphous silicon at an interface on a back side of the i-type semiconductor layer, and the second pin-junction has a third intermediate layer containing amorphous silicon at an interface on an incident light side of the i-type semiconductor layer and a fourth intermediate layer containing crystalline silicon at an interface on a back side of the i-type semiconductor layer.
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5. A photovoltaic element comprising a structure with a first pin-junction having an i-type semiconductor layer made of amorphous silicon and a second pin-junction having an i-type semiconductor layer made of crystalline silicon which are arranged in series on a substrate,
wherein an interface on a first side of the i-type semiconductor layer of the first pin-junction is in contact with a layer containing microcrystalline silicon, an interface on a second side of the i-type semiconductor layer of the first pin-junction is in contact with a layer made of amorphous silicon, an interface on a first side of the i-type semiconductor layer of the second pin-junction is in contact with a layer containing amorphous silicon, and an interface on a second side of the i-type semiconductor layer of the second pin-junction is in contact with a layer containing microcrystalline silicon.
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13. A method of forming a photovoltaic element, which comprising:
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applying a high frequency to a high-frequency introduction section to carry out high-frequency plasma CVD, the high-frequency introduction section facing a substrate, and the substrate and high frequency introduction section being arranged in a reaction container that can be decompressed; and
forming a photovoltaic element comprising a first pin-junction having an i-type semiconductor layer made of amorphous silicon, a second pin-junction having an i-type semiconductor layer made of crystalline silicon which are arranged in series on the substrate, and an intermediate layer at a p/i interface or n/i interface of the pin-junctions, wherein a high frequency for forming the i-type semiconductor layer is greater than a frequency for forming the intermediate layer. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification