×

System for probing, testing, burn-in, repairing and programming of integrated circuits

  • US 20040222809A1
  • Filed: 06/09/2004
  • Published: 11/11/2004
  • Est. Priority Date: 05/16/1988
  • Status: Active Grant
First Claim
Patent Images

1. A system for probing integrated circuits comprising:

  • a chamber including;

    at least one module having a holding fixture, a temperature control device and a probing device, said holding fixture adapted to hold a substrate having a plurality of integrated circuits, each of said integrated circuits having a plurality of conductive contact portions, said temperature control device for modifying the temperature of said substrate, said probing device having a plurality of probe points for simultaneously contacting substantially all of said plurality of conductive contact portions of substantially all of said integrated circuits of said substrate and having a plurality of active switching circuits incorporated on said probing device for controlling access to a majority of said conductive contact portions.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×