System for creating an inspection recipe, system for reviewing defects, method for creating an inspection recipe and method for reviewing defects

• US 20040223639A1
• Filed: 02/04/2004
• Published: 11/11/2004
• Est. Priority Date: 03/14/2003
• Status: Abandoned Application

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Sato, Yoshiyuki
• Application Number:
  US10/770,408
• Publication Number:
  US 20040223639A1
• Time in Patent Office: Days
• US Class Current: 382/145
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00

Abstract

A system for creating an inspection recipe, includes an inspection target selection module selecting an inspection target; a critical area extraction module extracting corresponding critical areas for defect sizes in the inspection target; a defect density prediction module extracting corresponding defect densities predicted by defects to be detected in the inspection target for the defect sizes; a killer defect calculation module calculating corresponding numbers of killer defects in the defect sizes based on the critical areas and the defect densities; and a detection expectation calculation module calculating another numbers of the killer defects expected to be detected for prospective inspection recipes determining rates of defect detection for the defect sizes, based on the numbers of the killer defects and the rates of defect detection prescribed in the prospective inspection recipes.

Claims

1. A system for creating an inspection recipe, comprising:

an inspection target selection module configured to select an inspection target;

a critical area extraction module configured to extract corresponding critical areas for a plurality of defect sizes in the inspection target, respectively;

a defect density prediction module configured to extract corresponding defect densities for the defect sizes, the defect densities being predicted by defects to be detected in the inspection target, respectively;

a killer defect calculation module configured to calculate corresponding numbers of killer defects in the defect sizes, based on the critical areas and the defect densities; and

a detection expectation calculation module configured to calculate respectively another numbers of the killer defects expected to be detected for a plurality of prospective inspection recipes which determine rates of defect detection for the defect sizes, based on the numbers of the killer defects and the rates of defect detection prescribed in the prospective inspection recipes.

2. The system of claim 1, further comprising an optimum inspection recipe determination module configured to obtain a prospective inspection recipe in which the another number of the killer defects is the largest.

3. The system of claim 1, further comprising:

a critical area storage unit configured to store the critical areas;

a predicted defect density storage unit configured to store the defect densities; and

an prospective inspection recipe storage unit configured to store the prospective inspection recipes.

4. The system of claim 1, wherein the inspection target selection module designates a type of product, a manufacturing process of the product and a region in the product.

5. The system of claim 1, wherein the calculation of the numbers of the killer defects is an integral of products of the critical areas and the defect densities with the defect sizes, respectively.

6. A system for reviewing a defect, comprising:

an inspection target selection module configured to select an inspection target;

a critical area extraction module configured to extract corresponding critical areas for a plurality of defect sizes in the inspection target, respectively;

a detected defect density extraction module configured to extract corresponding defect densities for the defect sizes, respectively, the defect densities being detected in the inspection target;

a killer defect calculation module configured to calculate corresponding numbers of killer defects in the defect sizes, respectively, based on the critical areas and the defect densities; and

a review number determination module configured to obtain corresponding numbers of defects to be reviewed for the defect sizes based on the numbers of the killer defects, respectively.

7. The system of claim 6, further comprising:

a review execution unit configured to review the defects detected in the inspection target in accordance with the numbers of the defects to be reviewed, respectively; and

a yield factor extraction module configured to extract a factor responsible for deterioration of a manufacturing yield based on a result of reviewing the defects detected in the inspection target.

8. The system of claim 6, further comprising:

a critical area storage unit configured to store the critical areas;

a detected defect density storage unit configured to store the defect densities; and

a review condition storage unit configured to store a condition for reviewing the defects detected in the inspection target.

9. The system of claim 6, wherein the inspection target selection module designates a type of product, a manufacturing process of the product and a region in the product.

10. The system of claim 6, wherein the calculation of the numbers of the killer defects is an integral of products of the critical areas and the defect densities with the defect sizes, respectively.

11. The system of claim 6, wherein the numbers of the defects to be reviewed are products of values obtained by dividing the numbers of the killer defects for the defect sizes by a total number of the killer defects and a total number of the defects to be reviewed.

12. A computer implemented method for creating an inspection recipe, comprising:

selecting an inspection target;

obtaining corresponding critical areas for a plurality of defect sizes in the inspection target, respectively;

obtaining corresponding defect densities for the defect sizes, the defect densities being predicted by defects to be detected in the inspection target, respectively;

calculating corresponding numbers of killer defects in the defect sizes, respectively, based on the critical areas and the defect densities; and

calculating respectively another numbers of the killer defects expected to be detected for a plurality of prospective inspection recipes which determine rates of defect detection for the defect sizes, based on the numbers of killer defects and the rates of defect detection prescribed in the prospective inspection recipes.

13. The method of claim 12, further comprising obtaining a prospective inspection recipe in which the another number of the killer defects expected to be detected is the largest.

14. The method of claim 12, wherein the inspection target includes a type of product, a manufacturing process of the product and a region in the product.

15. The system of claim 12, wherein the numbers of the killer defects are calculated by integrals of products of the critical areas and the defect densities with the defect sizes, respectively.

16. A computer implemented method for reviewing a defect, comprising:

selecting an inspection target;

obtaining corresponding critical areas for a plurality of defect sizes in the inspection target, respectively;

obtaining corresponding defect densities for the defect sizes, respectively, the defect densities being detected in the inspection target;

calculating corresponding numbers of killer defects in the defect sizes, respectively, based on the critical areas and the defect densities; and

obtaining corresponding numbers of the defects to be reviewed for the defect sizes based on the numbers of the killer defects, respectively.

17. The method of claim 16, further comprising:

reviewing the defects detected in the inspection target in accordance with the numbers of the defects to be reviewed; and

extracting a factor responsible for deterioration of a manufacturing yield based on a result of reviewing the defects detected in the inspection target.

18. The method of claim 16, wherein the inspection target includes a type of product, a manufacturing process of the product and a region in the product.

19. The system of claim 16, wherein the numbers of killer defects are calculated by integrals of products of the critical areas and the defect densities with the defect sizes, respectively.

20. The system of claim 16, wherein the numbers of the defects to be reviewed for the defect sizes are provided as products of values obtained by dividing the numbers of the killer defects in the defect sizes by a total number of the killer defects and a total number of the defects to be reviewed.