Method and system of dynamic learning through a regression-based library generation process
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Accused Products
Abstract
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.
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Citations
69 Claims
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1-10. -10 (Canceled).
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11. A method of setting up a regression optimization, comprising:
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receiving a set of measurements;
selecting values for one or more members selected from the group consisting of at least one parameter, at least one range associated with the at least one parameter, and at least one resolution associated with the at least one range;
running the regression optimization and generating regression results associated with the running of the regression optimization;
analyzing the generated regression results; and
using the generated regression results to adjust at least one member selected from the group consisting of the at least one parameter, the at least one range, and the at least one resolution. - View Dependent Claims (12, 13)
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14-17. -17 (Canceled).
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18. A method of managing a database, comprising:
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selecting or creating a set of one or more parameters, each parameter having a range and a resolution, storing at least one set of values associated with the one or more parameters to the database;
determining whether all value combinations associated with the set of one or more parameters have been stored into the database; and
if all of the value combinations have been stored into the database, compiling the database into a library. - View Dependent Claims (19, 20, 21)
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22-25. -25 (Canceled).
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26. A method of setting up a regression optimization, comprising:
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determining a first set of regression parameters;
receiving a first set of measurements associated with a first profile;
running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
storing the first set of resultant parameter values to a storage location;
receiving a second set of measurements associated with a second profile;
running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
determining a second set of regression parameters, wherein the second set of regression parameters is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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27. A method of setting up a regression optimization, comprising:
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determining a first set of one or more regression parameter ranges;
receiving a first set of measurements associated with a first profile;
running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
storing the first set of resultant parameter values to a storage location;
receiving a second set of measurements associated with a second profile;
running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
determining a second set of one or more regression parameter ranges, wherein the second set one or more regression parameter ranges is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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28-43. -43 (Canceled).
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44. A computer program product for use in setting up a regression optimization, said computer program product comprising:
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a computer usable medium including computer readable program code embodied in said medium for causing setting up the regression optimization;
computer readable program code for causing receiving a set of measurements;
computer readable program code for causing a computer to effect selecting values for one or more members selected from the group consisting of at least one parameter, at least one range associated with the at least one parameter, and at least one resolution associated with the at least one range;
computer readable program code for causing said computer to effect running the regression optimization and generating regression results associated with the running of the regression optimization;
computer readable program code for causing said computer to effect analyzing the generated regression results; and
computer readable program code for causing said computer to effect using the generated regression results to adjust at least one member selected from the group consisting of the at least one parameter, the at least one range, and the at least one resolution. - View Dependent Claims (46)
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45. An article of manufacture comprising:
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a computer usable medium including computer readable program code embodied therein for causing setting up a regression optimization, the computer readable program code in said article of manufacture comprising;
computer readable program code for causing a computer to effect receiving a set of measurements;
computer readable program code for causing said computer to effect selecting values for one or more members selected from the group consisting of at least one parameter, at least one range associated with the at least one parameter, and at least one resolution associated with the at least one range;
computer readable program code for causing said computer to effect running the regression optimization and generating regression results associated with the running of the regression optimization;
computer readable program code for causing said computer to effect analyzing the generated regression results; and
computer readable program code for causing said computer to effect using the generated regression results to adjust at least one member selected from the group consisting of the at least one parameter, the at least one range, and the at least one resolution. - View Dependent Claims (47)
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48-51. -51 (Canceled).
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52. A computer program product for use in managing a database, said computer program product comprising:
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a computer usable medium including computer readable program code embodied in said medium for causing managing the database;
computer readable program code for causing a computer to effect selecting or creating a set of one or more parameters, each parameter having a range and a resolution;
computer readable program code for causing said computer to effect storing at least one set of values associated with the one or more parameters to the database;
computer readable program code for causing said computer to effect determining whether all value combinations associated with the set of one or more parameters have been stored into the database, and if all of the value combinations have been stored into the database, computer readable program code for causing said computer to effect compiling the database into a library. - View Dependent Claims (54, 56)
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53. An article of manufacture comprising:
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a computer usable medium including computer readable program code embodied therein for causing managing a database, the computer readable program code in said article of manufacture comprising;
computer readable program code for causing a computer to effect selecting or creating a set of one or more parameters, each parameter having a range and a resolution;
computer readable program code for causing said computer to effect storing at least one set of values associated with the one or more parameters to the database;
computer readable program code for causing said computer to effect determining whether all value combinations associated with the set of one or more parameters have been stored into the database, and if all of the value combinations have been stored into the database, computer readable program code for causing said computer to effect compiling the database into a library. - View Dependent Claims (55, 57)
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58-65. -65 (Canceled).
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66. A computer program product for use in setting up a regression optimization, said computer program product comprising:
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a computer usable medium including computer readable program code embodied in said medium for setting up the regression optimization;
computer readable program code for causing a computer to effect determining a first set of regression parameters;
computer readable program code for causing said computer to effect receiving a first set of measurements associated with a first profile;
computer readable program code for causing said computer to effect running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
computer readable program code for causing said computer to effect storing the first set of resultant parameter values to a storage location;
computer readable program code for causing said computer to effect receiving a second set of measurements associated with a second profile;
computer readable program code for causing said computer to effect running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
computer readable program code for causing said computer to effect determining a second set of regression parameters, wherein the second set of regression parameters is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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67. An article of manufacture comprising:
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a computer usable medium including computer readable program code embodied therein for causing setting up a regression optimization, the computer readable program code in said article of manufacture comprising;
computer readable program code for causing a computer to effect determining a first set of regression parameters;
computer readable program code for causing said computer to effect receiving a first set of measurements associated with a first profile;
computer readable program code for causing said computer to effect running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
computer readable program code for causing said computer to effect storing the first set of resultant parameter values to a storage location;
computer readable program code for causing said computer to effect receiving a second set of measurements associated with a second profile;
computer readable program code for causing said computer to effect running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
computer readable program code for causing said computer to effect determining a second set of regression parameters, wherein the second set of regression parameters is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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68. A computer program product for use in setting up a regression optimization, said computer program product comprising:
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a computer usable medium including computer readable program code embodied in said medium for setting up the regression optimization;
computer readable program code for causing a computer to effect determining a first set of one or more regression parameter ranges;
computer readable program code for causing said computer to effect receiving a first set of measurements associated with a first profile;
computer readable program code for causing said computer to effect running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
computer readable program code for causing said computer to effect storing the first set of resultant parameter values to a storage location;
computer readable program code for causing said computer to effect receiving a second set of measurements associated with a second profile;
computer readable program code for causing said computer to effect running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
computer readable program code for causing said computer to effect determining a second set of one or more regression parameter ranges, wherein the second set one or more regression parameter ranges is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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69. An article of manufacture comprising:
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a computer usable medium including computer readable program code embodied therein for causing setting up a regression optimization, the computer readable program code in said article of manufacture comprising;
computer readable program code for causing a computer to effect determining a first set of one or more regression parameter ranges;
computer readable program code for causing said computer to effect receiving a first set of measurements associated with a first profile;
computer readable program code for causing said computer to effect running the regression optimization on the first set of measurements to obtain a first set of resultant parameter values associated with the first profile;
computer readable program code for causing said computer to effect storing the first set of resultant parameter values to a storage location;
computer readable program code for causing said computer to effect receiving a second set of measurements associated with a second profile;
computer readable program code for causing said computer to effect running the regression optimization on the second set of measurements to obtain a second set of resultant parameter values associated with the second profile; and
computer readable program code for causing said computer to effect determining a second set of one or more regression parameter ranges, wherein the second set one or more regression parameter ranges is associated with at least one member selected from the group consisting of the first set of resultant parameter values and the second set of resultant parameter values.
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Specification