ELECTROSTATIC SPRING SOFTENING IN REDUNDANT DEGREE OF FREEDOM RESONATORS
First Claim
1. A resonator gyroscope, comprising:
- an isolated resonator having a first and a second differential vibration mode;
a baseplate supporting the isolated resonator;
a plurality of excitation electrodes affixed to the baseplate for exciting the first differential vibration mode;
a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode; and
a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes.
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Abstract
The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.
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Citations
26 Claims
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1. A resonator gyroscope, comprising:
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an isolated resonator having a first and a second differential vibration mode;
a baseplate supporting the isolated resonator;
a plurality of excitation electrodes affixed to the baseplate for exciting the first differential vibration mode;
a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode; and
a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of producing a resonator gyroscope, comprising:
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providing an isolated resonator having a first and a second differential vibration mode;
supporting the isolated resonator with a baseplate;
affixing a plurality of excitation electrodes to the baseplate for exciting the first differential vibration mode;
affixing a plurality of sensing electrodes to the baseplate for sensing movement of the gyroscope through the second differential vibration mode; and
affixing a plurality of bias electrodes to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification