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System and a method of driving a parallel-plate variable micro-electromechanical capacitor

  • US 20040227493A1
  • Filed: 01/23/2004
  • Published: 11/18/2004
  • Est. Priority Date: 04/30/2003
  • Status: Active Grant
First Claim
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1. A method of driving a parallel-plate variable micro-electromechanical capacitor, comprising:

  • establishing a first charge differential across a first and a second conductive plate of said variable capacitor wherein said first and second conductive plates are separated by a variable gap distance;

    isolating said first and second plates for a first duration; and

    decreasing said charge differential to a final charge differential being less than said first charge differential and wherein said second charge differential corresponds to a second value of said variable gap distance.

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