Film-forming method, film-forming apparatus, apparatus and a method for manufacturing color filter substrate, apparatus and method for manufacturing substrate for electroluminescent device, method for manufacturing display device, display device, and electronic apparatus
First Claim
1. A film-forming method for forming a planar periodic structure having a predetermined periodicity by depositing liquid material on an object, the method comprising:
- providing liquid drop supplying means capable of supplying a liquid drop at a predetermined driving period to deposit the liquid material on the object;
controlling the presence or absence of the supply of the liquid drop by the liquid drop supplying means at each driving period of the driving period in accordance with the periodicity of the planar periodic structure to be formed on the object; and
supplying the liquid drop by the control of the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object;
wherein a natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic structure, to be formed on the object, in the scanning direction.
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Accused Products
Abstract
A film-forming method is provided for forming a planar periodic structure having a predetermined periodicity by depositing liquid material on an object. A liquid drop supplying means is used which supplies a liquid drop at a predetermined driving period to deposit the liquid material on the object; the presence or absence of the supply of the liquid drop is controlled at each driving period in accordance with the periodicity of the planar periodic structure to be formed; and the liquid drop is supplied by controlling the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object. A natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic structure in the scanning direction.
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Citations
28 Claims
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1. A film-forming method for forming a planar periodic structure having a predetermined periodicity by depositing liquid material on an object, the method comprising:
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providing liquid drop supplying means capable of supplying a liquid drop at a predetermined driving period to deposit the liquid material on the object;
controlling the presence or absence of the supply of the liquid drop by the liquid drop supplying means at each driving period of the driving period in accordance with the periodicity of the planar periodic structure to be formed on the object; and
supplying the liquid drop by the control of the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object;
wherein a natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic structure, to be formed on the object, in the scanning direction. - View Dependent Claims (2, 3, 4, 5, 24, 27, 28)
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6. A film-forming apparatus for forming a planar periodic structure having a predetermined periodicity by depositing the liquid material on an object, the apparatus comprising:
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liquid drop supplying means capable of supplying a liquid drop at a predetermined driving period to deposit the liquid drop on the object;
control means capable of controlling the presence or absence of the liquid drop by the liquid drop supplying means at each driving period of the driving period;
scanning means to scan the liquid drop supplying means relative to the object in a predetermined scanning direction; and
driving period setting means capable of adjusting and setting the driving period. - View Dependent Claims (7, 8, 9)
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10. A method for manufacturing a color filter substrate comprising:
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a film-forming step in which liquid material is supplied onto a substrate to film-form a plurality of filter elements in a planar periodic pattern having a predetermined periodicity;
wherein, in the film-forming process, liquid drop supplying means is used which is capable of supplying a liquid drop at a predetermined driving period to deposit the liquid material on the object;
the presence or absence of the supply of the liquid drop by the liquid drop supplying means is controlled at each driving period of the driving period in accordance with the periodicity of the planar periodic pattern to be formed on the object; and
the liquid drop is supplied by the control of the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object; and
wherein a natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic pattern, to be formed, in the scanning direction. - View Dependent Claims (11, 12, 13, 14, 15, 16, 25)
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17. A method for manufacturing a substrate for an electroluminescent device comprising:
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a film-forming step in which the liquid material is supplied onto the substrate to film-form a plurality of pixel regions in a planar periodic pattern having a predetermined periodicity;
wherein, in the film-forming process;
liquid drop supplying means is used which is capable of supplying a liquid drop at a predetermined driving period to deposit the liquid material on the object;
the presence or absence of the supply of the liquid drop by the liquid drop supplying means is controlled at each driving period in accordance with the periodicity of the planar periodic pattern to be formed on the object; and
the liquid drop is supplied by the control of the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object; and
wherein a natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic pattern, to be formed on the object, in the scanning direction. - View Dependent Claims (18, 19, 20, 21, 22, 23, 26)
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Specification