Rotary gyroscope
First Claim
1. A rotary gyroscope, comprising:
- a base plate;
an intermediate structure, including;
a driven element supported in a spaced-apart relation from the base plate and floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is vertical to a center plane thereof;
a driving electrode driving the driven element to perform the oscillating motion with respect to the first axis; and
a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis; and
a cover covering the intermediate structure and having a sensing electrode arranged in a position corresponding to the sensing element in a spaced-apart relation therewith to detect the sensing motion of the sensing element.
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Accused Products
Abstract
A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is vertical to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.
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Citations
23 Claims
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1. A rotary gyroscope, comprising:
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a base plate;
an intermediate structure, including;
a driven element supported in a spaced-apart relation from the base plate and floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is vertical to a center plane thereof;
a driving electrode driving the driven element to perform the oscillating motion with respect to the first axis; and
a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis; and
a cover covering the intermediate structure and having a sensing electrode arranged in a position corresponding to the sensing element in a spaced-apart relation therewith to detect the sensing motion of the sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification