Integrated monolithic tri-axial micromachined accelerometer
First Claim
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1. A monolithic integrated 3-axis accelerometer chip, comprising:
- a single crystal substrate, said single crystal substrate including at least one single crystal membrane layer portion, and a single sensor microstructure formed using said membrane layer, said sensor microstructure capacitively sensing acceleration in all three orthogonal axes.
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Abstract
A monolithic integrated 3-axis accelerometer chip includes a single crystal substrate, the substrate including at least one single crystal membrane layer portion. A single sensor microstructure made from the single crystal membrane senses acceleration in each of the three orthogonal directions. At least one electronic circuit can also be disposed on the chip, such as a circuit for driving, detecting, controlling and signal processing.
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20 Claims
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1. A monolithic integrated 3-axis accelerometer chip, comprising:
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a single crystal substrate, said single crystal substrate including at least one single crystal membrane layer portion, and a single sensor microstructure formed using said membrane layer, said sensor microstructure capacitively sensing acceleration in all three orthogonal axes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification