Capacitance type physical quantity sensor
First Claim
1. A capacitance type physical quantity sensor for detecting physical quantity, the sensor comprising:
- a movable portion including a movable electrode; and
a fixed portion including a fixed electrode;
wherein the movable electrode includes a detection surface, wherein the fixed electrode includes a detection surface facing the detection surface of the movable electrode, wherein the movable electrode is movable toward or against the fixed electrode in accordance with the physical quantity applied to the sensor so that a distance between the detection surfaces of the movable and the fixed electrodes is changeable, wherein at least one of the movable and the fixed electrodes includes a groove, and wherein the groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface opposite to the detection surface of the one of the movable and the fixed electrodes.
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Accused Products
Abstract
A capacitance type physical quantity sensor detects physical quantity. The sensor includes a movable portion including a movable electrode and a fixed portion including a fixed electrode. The fixed electrode includes a detection surface facing a detection surface of the movable electrode. The movable electrode is movable toward the fixed electrode in accordance with the physical quantity so that a distance between the detection surfaces is changeable. At least one of the movable and the fixed electrodes includes a groove. The groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface.
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Citations
20 Claims
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1. A capacitance type physical quantity sensor for detecting physical quantity, the sensor comprising:
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a movable portion including a movable electrode; and
a fixed portion including a fixed electrode;
wherein the movable electrode includes a detection surface, wherein the fixed electrode includes a detection surface facing the detection surface of the movable electrode, wherein the movable electrode is movable toward or against the fixed electrode in accordance with the physical quantity applied to the sensor so that a distance between the detection surfaces of the movable and the fixed electrodes is changeable, wherein at least one of the movable and the fixed electrodes includes a groove, and wherein the groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface opposite to the detection surface of the one of the movable and the fixed electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A capacitance type physical quantity sensor for detecting physical quantity, the sensor comprising:
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a movable portion including a movable electrode; and
a fixed portion including a fixed electrode, wherein the movable electrode includes a detection surface, wherein the fixed electrode includes a detection surface facing the detection surface of the movable electrode, wherein the movable electrode is movable toward or against the fixed electrode in accordance with the physical quantity applied to the sensor so that a distance between the detection surfaces of the movable and the fixed electrodes is changeable, wherein at least one of the movable and the fixed electrodes includes a thin portion, and wherein the thin portion extends from the detection surface to an opposite surface opposite to the detection surface of the one of the movable and the fixed electrodes. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification