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Acceleration sensor and manufacturing method for the same

  • US 20040231422A1
  • Filed: 06/29/2004
  • Published: 11/25/2004
  • Est. Priority Date: 05/13/2002
  • Status: Active Grant
First Claim
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1. An acceleration sensor comprising:

  • a displacing section;

    a fixed section provided adjacent to said displacing section;

    a connecting portion for connecting said displacing section to said fixed section so that said displacing section can displace;

    a weight connected to said displacing section below;

    a pedestal which is disposed adjacent to said weight;

    a pedestal joint layer connecting said pedestal and said fixed section; and

    a displacement detector for detecting a displacement of said displacing section;

    wherein said weight includes an upper surface peripheral portion that opposes a control surface formed on a lower surface of said fixed section so that when an acceleration with a certain degree of magnitude is applied to said weight, said upper surface peripheral portion comes into contact with said control surface to control displacement.

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