Liquid crystal display device and fabrication method thereof
First Claim
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1. A liquid crystal display device comprising:
- a first insulating substrate and a second insulating substrate disposed to be opposite to the first insulating substrate;
a liquid crystal layer being interposed between said first insulating substrate and said second insulating substrate;
a lower electrode, a dielectric film, a protective film and an upper electrode being formed said first insulating substrate, and said dielectric film and said protective film are formed between said lower electrode and said upper electrode;
a semiconductor layer formed between said dielectric film and said protective film, wherein said upper electrode contacts with said semiconductor layer through a contact hole provided by perforating said protective film.
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Abstract
The present invention provides a novel photolithography processes using photoresist pattern having at least two areas which has different thickness from each other for a fabrication method for a liquid crystal display device having reversed staggered and channel-etched type thin film transistors, reduce a number of photolithography processes required for whole of the fabrication process of the liquid crystal display device, and improve brightness of the liquid crystal display device.
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21 Claims
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1. A liquid crystal display device comprising:
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a first insulating substrate and a second insulating substrate disposed to be opposite to the first insulating substrate;
a liquid crystal layer being interposed between said first insulating substrate and said second insulating substrate;
a lower electrode, a dielectric film, a protective film and an upper electrode being formed said first insulating substrate, and said dielectric film and said protective film are formed between said lower electrode and said upper electrode;
a semiconductor layer formed between said dielectric film and said protective film, wherein said upper electrode contacts with said semiconductor layer through a contact hole provided by perforating said protective film. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A liquid crystal display device comprising:
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a pair of substrates;
a liquid crystal layer interposed between said pair of substrates;
a plurality of drain wiring lines and a plurality of gate wiring lines being formed one of said pair of substrates;
at least one pixel is composed in respective regions surrounded by said drain wiring lines and said gate wiring lines;
a lower electrode, a dielectric film, a protective film, and an upper electrode being formed at location corresponding to said at least one pixel in this order;
a semiconductor layer formed between said dielectric film and said protective film, and wherein said upper electrode contacts with said semiconductor layer through a contact hole provided by perforating said protective film. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14)
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15. A liquid crystal display device comprising:
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a pair of substrates;
a liquid crystal layer interposed between said pair of substrates;
a plurality of drain wiring lines and a plurality of gate wiring lines being formed one of said pair of substrates;
at least one pixel is composed in respective regions surrounded by said drain wiring lines and said gate wiring lines;
a lower electrode, a dielectric film, a protective film, an organic protective film, and an upper electrode being formed at location corresponding to said at least one pixel in this order;
a semiconductor layer formed between said dielectric film and said protective film, and a contact hole is provided by perforating said organic protective film, said protective film, and said semiconductor layer. - View Dependent Claims (16, 17, 18, 19, 20, 21)
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Specification