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Methods and apparatus for measuring orientation and distance

  • US 20040233461A1
  • Filed: 06/09/2004
  • Published: 11/25/2004
  • Est. Priority Date: 11/12/1999
  • Status: Abandoned Application
First Claim
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1. An image metrology reference target, comprising:

  • at least one fiducial mark; and

    at least one orientation dependent radiation source disposed in a predetermined spatial relationship with respect to the at least one fiducial mark, the at least one orientation dependent radiation source emanating from an observation surface orientation dependent radiation having at least one detectable property in an image of the reference target that varies as a function of at least one of a rotation angle of the orientation dependent radiation source and a distance between the orientation dependent radiation source and a camera obtaining the image of the reference target.

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