Integrated chemical microreactor, thermally insulated from detection electrodes, and manufacturing and operating methods therefor
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Abstract
Integrated microreactor, formed in a monolithic body and including a semiconductor material region and an insulating layer; a buried channel extending in the semiconductor material region; a first and a second access trench extending in the semiconductor material region and in the insulating layer, and in communication with the buried channel; a first and a second reservoir formed on top of the insulating layer and in communication with the first and the second access trench; a suspended diaphragm formed by the insulating layer, laterally to the buried channel; and a detection electrode, supported by the suspended diaphragm, above the insulating layer, and inside the second reservoir.
29 Citations
45 Claims
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1-33. -33. (Canceled)
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34. A method, comprising applying a biological fluid and a reagent to an integrated microreactor comprising:
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a) a monolithic semiconductor body;
b) a buried channel, extending inside said monolithic semiconductor body;
c) a first and a second access cavity in communication with said buried channel;
d) a reservoir having a suspended diaphragm formed from said monolithic semiconductor body, laterally to said buried channel and in fluid communication with said buried channel; and
e) a detection electrode, supported by said suspended diaphragm, i) wherein a biological reaction occurs in said buried channel and said biological reaction is detected at said detection electrode. - View Dependent Claims (35, 36)
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37. A method, comprising:
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a) introducing a fluid into a buried channel via a first access trench, the buried channel extending inside a monolithic semiconductor material body at a distance from a surface of the semiconductor material body;
b) heating the fluid within the buried channel and optionally cooling the fluid within the buried channel;
c) extracting the fluid from the buried channel via a second access trench into a reservoir that is lateral to said buried channel;
said reservoir comprising a suspended diaphragm and having a sensing electrode structure on said diaphragm; and
d) detecting a desired product within the fluid by the use of said sensing electrode. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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44. An integrated microreactor, comprising:
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a) a monolithic body, having a semiconductor material region;
b) a buried channel, extending inside said semiconductor material region;
c) a first and a second access cavity, extending in said monolithic body, and in communication with said buried channel;
d) a suspended diaphragm formed from said monolithic body, laterally to said buried channel; and
e) a detection electrode, supported by said suspended diaphragm. - View Dependent Claims (45)
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Specification