Endpoint determination of process residues in wafer-less auto clean process using optical emission spectroscopy

• US 20040235303A1
• Filed: 06/25/2004
• Published: 11/25/2004
• Est. Priority Date: 05/04/2001
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Baldwin, Scott, Wong, Vincent, Richardson, Brett C., Lui, Andrew
• Application Number:
  US10/876,442
• Publication Number:
  US 20040235303A1
• Time in Patent Office: Days
• US Class Current: 438/689
• CPC Class Codes: B08B 3/06 using perforated drums in which the article or material is placed B08B3/042 takes precedence
• CPC Class Codes: B08B 7/0035 by radiant energy, e.g. UV, laser, light beam or the like
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: H01J 37/32862 In situ cleaning of vessels and/or internal parts
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

A plasma processing system is provided. The plasma processing system includes a processing chamber having a gas inlet for introducing cleaning gases. The cleaning gas is optimized to remove byproducts deposited on inner surfaces of the processing chamber. The processing chamber includes a top electrode for creating a plasma from the cleaning gas to perform the cleaning process. A variable conductance meter for controlling a pressure inside the processing chamber independently of a flow rate of process gases is included. The variable conductance meter is positioned on an outlet of the chamber. An optical emission spectrometer (OES) for detecting an endpoint of the cleaning process performed in the processing chamber is included. The OES is located to detect an emission intensity in the processing chamber from the plasma. The OES is configured to trace the emission intensity. A pumping system for evacuating the processing chamber between processing operations is included.

Claims

1. A plasma processing system for executing a two step in-situ cleaning process, comprising:

a processing chamber having;

a gas inlet for introducing a cleaning gas, the cleaning gas optimized to remove byproducts deposited on inner surfaces of the processing chamber, and

a top electrode for creating a plasma from the cleaning gas to perform an in-situ cleaning process;

a variable conductance meter for controlling a pressure inside the processing chamber independently of a flow rate of process gases, the variable conductance meter positioned on an outlet of the processing chamber;

an optical emission spectrometer (OES) for detecting an endpoint of the in-situ cleaning process performed in the processing chamber, the OES located so as to detect an emission intensity in the processing chamber from the plasma, the OES configured to trace the emission intensity from the plasma; and

a pumping system for evacuating the processing chamber between processing operations.

2. The plasma processing system of claim 1, wherein the in-situ cleaning process is a two step wafer-less auto clean (WAC) having a first cleaning step optimized to remove silicon based byproducts and a second cleaning step optimized to remove carbon based byproducts.

3. The plasma processing system of claim 2, wherein the OES is configured to detect wavelengths corresponding to each of the silicon based byproducts and the carbon based byproducts.

4. The plasma processing system of claim 3, wherein the wavelengths are selected from the group consisting of 309 nanometers (nm), 390 nm, 520 mn, 680 and 703 nm.

5. The plasma processing system of claim 1, wherein the OES outputs a signal corresponding to the trace of the emission intensity to a computing device, the computing device tracking the signal over time in order to trigger a transition from a first gas of the in-situ cleaning process to a second gas.

6. The plasma processing system of claim 1, wherein the first gas is a fluorine based gas for removing silicon based by products from inner surfaces of the processing chamber and the second gas is an oxygen based gas configured to remove carbon based by-products.

7. A plasma processing system for executing a two step wafer-less auto clean process, comprising:

a processing chamber having;

a gas inlet for introducing a cleaning gas, the cleaning gas optimized to remove byproducts deposited on inner surfaces of the processing chamber, and

a top electrode for creating a plasma from the cleaning gas to perform an in-situ cleaning process;

a variable conductance meter for controlling a pressure inside the processing chamber independently of a flow rate of process gases, the variable conductance meter positioned on an outlet of the processing chamber;

an optical emission spectrometer (OES) for detecting an endpoint of the in-situ cleaning process performed in the processing chamber, the OES located so as to detect an emission intensity in the processing chamber from the plasma, the OES configured to trace the emission intensity from the plasma;

a pumping system for evacuating the processing chamber between processing operations; and

a computing device in communication with the OES, the computing device configured to trigger introduction of a first cleaning gas configured to remove silicon based by products from inner surfaces of the processing chamber, the computing device further configured to terminate the introduction of the first cleaning gas based upon the emission intensity, wherein in response to terminating the first cleaning gas, the computing device triggers introduction of a second cleaning gas through the gas inlet.

8. The system of claim 7, wherein the second cleaning gas is configured to remove carbon based by products from inner surfaces of the processing chamber.

9. The system of claim 7, wherein the OES is configured to detect wavelengths corresponding to each of the silicon based byproducts and the carbon based byproducts.

10. The system of claim 9, wherein the computing device terminates the introduction of the first cleaning gas based upon one of the wavelengths corresponding to the silicon based byproducts.

11. The system of claim 9, wherein the wavelengths corresponding to the silicon based byproducts is selected from the group consisting of 309 nanometers (nm), 390 nm, 680 nm, and 703 nm.

12. The system of claim 9, wherein the wavelength corresponding to the silicon based byproducts is 52 nm.