Method and apparatus for combining and generating trajectories
First Claim
1. A method for generating a trajectory used in precision lithography, comprising:
- receiving first input parameters for a first trajectory and second input parameters for a second trajectory;
converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk;
arranging the first derivative-jerk to overlap the second derivative-jerk by a time interval and reduce the time period for performing the first trajectory and second trajectory; and
combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk using a smaller time interval than required separately by the first derivative-jerk and the second derivative-jerk.
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Abstract
An apparatus and method for generating a trajectory used in precision lithography, includes receiving first input parameters for a first trajectory and second input parameters for a second trajectory, converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk. The first and second derivative-jerk are arranged with the first derivative-jerk overlapping the second derivative-jerk by a time interval, and then combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk using a shorter period of time compared with the time to finish the combination of the first derivative-jerk and the second derivative-jerk.
83 Citations
38 Claims
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1. A method for generating a trajectory used in precision lithography, comprising:
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receiving first input parameters for a first trajectory and second input parameters for a second trajectory;
converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk;
arranging the first derivative-jerk to overlap the second derivative-jerk by a time interval and reduce the time period for performing the first trajectory and second trajectory; and
combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk using a smaller time interval than required separately by the first derivative-jerk and the second derivative-jerk. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for generating a trajectory to drive a stage, comprising:
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receiving first input parameters for a first trajectory and second input parameters for a second trajectory;
converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk;
combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk corresponding to a modified version of the first trajectory and the second trajectory; and
determining a combined trajectory associated with the third derivative-jerk by integrating the third derivative-jerk one or more times. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An exposure apparatus that exposes a substrate during processing, comprising:
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an energy emission system that forms an image on a substrate;
a substrate stage that supports the substrate and moves the substrate along one or more axes relative to the energy emission system;
an actuator operatively connected to the substrate stage that moves the substrate stage in response to controller signals corresponding to a trajectory;
a controller operatively connected to the actuator that generates the trajectory by receiving first input parameters for a first trajectory and second input parameters for a second trajectory, converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk, and combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk that modifies the first trajectory and the second trajectory. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. An apparatus for generating a trajectory used in precision lithography, comprising:
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means for receiving first input parameters for a first trajectory and second input parameters for a second trajectory;
means for converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk;
means for arranging the first derivative-jerk to overlap the second derivative jerk by a time interval and reduce the time period for performing the first trajectory and second trajectory; and
means for combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk using a smaller time interval than required separately by the first derivative-jerk and the second derivative-jerk.
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Specification