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Method and apparatus for combining and generating trajectories

  • US 20040236453A1
  • Filed: 05/22/2003
  • Published: 11/25/2004
  • Est. Priority Date: 05/22/2003
  • Status: Abandoned Application
First Claim
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1. A method for generating a trajectory used in precision lithography, comprising:

  • receiving first input parameters for a first trajectory and second input parameters for a second trajectory;

    converting the first input parameters of the first trajectory into a first derivative-jerk and the second input parameters of the second trajectory into a second derivative-jerk;

    arranging the first derivative-jerk to overlap the second derivative-jerk by a time interval and reduce the time period for performing the first trajectory and second trajectory; and

    combining the first derivative-jerk and the second derivative-jerk together into a third derivative-jerk using a smaller time interval than required separately by the first derivative-jerk and the second derivative-jerk.

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