MAGNETIC THIN FILM INDUCTORS

• US 20040239468A9
• Filed: 02/25/2004
• Published: 12/02/2004
• Est. Priority Date: 12/11/2001
• Status: Active Grant

• Current Assignee: Intersil Americas LLC (Renesas Electronics Corporation)
• Original Assignee: Intersil Americas LLC (Renesas Electronics Corporation)
• Inventors: Wang, Xingwu, Yang, Chungsheng
• Granted Patent: US 6,822,548 B2
• Time in Patent Office: Days
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 17/06 with core substantially closed in itself, e.g. toroid
• CPC Class Codes: H01F 41/046 structurally combined with ferromagnetic material
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

The present invention relates to inductors with improved inductance and quality factor. In one embodiment, a magnetic thin film inductor is disclosed. In this embodiment, magnetic thin film inductor includes a plurality of elongated conducting regions and magnetic material. The plurality of elongated conducting regions are positioned parallel with each other and at a predetermined spaced distance apart from each other. The magnetic material encases the plurality of conducting regions, wherein when currents are applied to the conductors, current paths in each of the conductors cause the currents to generally flow in the same direction thereby enhancing mutual inductance.

Claims

1. A magnetic thin film inductor comprising:

a plurality of elongated conducting regions positioned parallel with each other and at a selected spaced distance apart from each other; and

magnetic material encasing the plurality of conducting regions, wherein when currents are applied to the conducting regions, current paths in each of the conducting regions cause the currents to generally flow in the same direction to enhance mutual inductance.

2. The magnetic thin film inductor of claim 1, wherein the magnetic material further has cutout sections to reduce eddy currents.

3. The magnetic thin film inductor of claim 1, further comprising:

an insulating layer for each conducting region, the insulating layer is positioned between an associated conducting region and the magnetic material.

4. The magnetic thin film inductor of claim 1, wherein the magnetic material is made from layers of different magnetic material.

5. The magnetic thin film inductor of claim 1, wherein the magnetic material is made from the group consisting of, FeAlO, FeBN, FeBO, FeBC, FeCoBF, FeSiO, FeHfO, FeCoSiBO, FeSmO, FeAlBO, FeSmBO, FeCoSmO, FeZrO, FeNdO, FeYO, FeMgO, CoFeHfO, CoFeSiN, CoAlO, CoAlPdO, CoFeAlO, CoYO and CoFeBSiO.

6. The magnetic thin film inductor of claim 5, wherein the thickness of the magnetic material is in a range of about 0.1 to 1.5 micrometers.

7. A magnetic film inductor comprising:

two or more conductive member positioned parallel to each other;

magnetic material encasing the two or more conductive members along at least one relatively straight path of the two or more conductive members, wherein current flowing through the two or more conductive members in the same direction enhance mutual inductance of the magnetic film inductor.

8. The magnetic film of claim 7, wherein the magnetic material along at least one relatively straight path has at least one cutout section to prevent eddy currents.

9. The magnetic film of claim 7, further comprising:

an insulating layer formed between each conducting member and the magnetic material.

10. The magnetic film of claim 7, wherein the magnetic material is made from the group consisting of, FeAlO, FeBN, FeBO, FeBC, FeCoBF, FeSiO, FeHfO, FeCoSiBO, FeSmO, FeAlBO, FeSmBO, FeCoSmO, FeZrO, FeNdO, FeYO, FeMgO, CoFeHfO, CoFeSiN, CoAlO, CoAIPdO, CoFeAlO, CoYO and CoFeBSiO.

11. The magnetic thin film inductor of claim 10, wherein the thickness of the magnetic material is in a range of about 0.1 to 1.5 micrometers.