Imaging apparatus
First Claim
1. An imaging apparatus comprising:
- a programmable patterning structure configured to pattern a beam of radiation, the programmable patterning structure including a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam;
a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, the combining structure including at least one of the group consisting of a reflector and a beam splitter; and
a projection system configured to project the patterned image onto a target portion of a substrate, wherein at least one of the patterned sub-beams is spatially modulated, and wherein each of the plurality of separate patterned sub-elements includes an array of individually controllable radiation modulating devices, and wherein at least a set of the plurality of separate patterned sub-elements is arranged on a carrier plate in a staggered configuration.
1 Assignment
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Accused Products
Abstract
An imaging apparatus according to one embodiment of the invention includes a programmable patterning structure configured to pattern a projection beam of radiation according to a desired pattern. The programmable patterning structure includes a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam. At least one of the separate patterning sub-elements is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities. The imaging apparatus also includes a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, and a projection system configured to project the patterned image onto a target portion of a substrate.
26 Citations
36 Claims
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1. An imaging apparatus comprising:
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a programmable patterning structure configured to pattern a beam of radiation, the programmable patterning structure including a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam;
a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, the combining structure including at least one of the group consisting of a reflector and a beam splitter; and
a projection system configured to project the patterned image onto a target portion of a substrate, wherein at least one of the patterned sub-beams is spatially modulated, and wherein each of the plurality of separate patterned sub-elements includes an array of individually controllable radiation modulating devices, and wherein at least a set of the plurality of separate patterned sub-elements is arranged on a carrier plate in a staggered configuration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An imaging apparatus comprising:
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a programmable patterning structure configured to pattern a beam of radiation, the programmable patterning structure including a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam;
a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, the combining structure including at least one of the group consisting of a reflector and a beam splitter; and
a projection system configured to project the patterned image onto a target portion of a substrate, wherein at least one of the patterned sub-beams is spatially modulated, and wherein at least one of the plurality of separate patterned sub-elements includes a plurality of separate arrays of radiation modulating devices, said plurality of separate arrays being arranged on a carrier plate in a staggered configuration. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A device manufacturing method, said method comprising:
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providing a beam of radiation;
generating a plurality of patterned sub-beams based on the beam of radiation, at least one sub-beam being spatially modulated;
combining the plurality of patterned sub-beams into a single patterned image; and
projecting the patterned image onto a target portion of a layer of radiation-sensitive material that at least partially covers a surface of a substrate, wherein said generating a plurality of patterned sub-beams includes generating at least one of the plurality of patterned sub-beams from a plurality of separate arrays of radiation modulating devices, said plurality of separate arrays being arranged in a staggered configuration, and wherein said combining includes at least one of the group consisting of (1) using a reflector to reflect at least one of the patterned sub-beams and (2) passing at least one of the patterned sub-beams through a beam splitter. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification