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High fill ratio reflective spatial light modulator with hidden hinge

  • US 20040240033A1
  • Filed: 05/18/2004
  • Published: 12/02/2004
  • Est. Priority Date: 06/19/2002
  • Status: Active Grant
First Claim
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1. A micro mirror comprising:

  • a mirror plate having an upper surface and a lower surface;

    a hinge connected to the mirror plate for allowing the mirror plate to rotate relative to a longitudinal axis of the hinge; and

    a reflective surface on the upper surface of the mirror plate and above a portion of the hinge, the reflective surface having an area greater than an area of the upper surface of the mirror plate.

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