High fill ratio reflective spatial light modulator with hidden hinge
First Claim
Patent Images
1. A micro mirror comprising:
- a mirror plate having an upper surface and a lower surface;
a hinge connected to the mirror plate for allowing the mirror plate to rotate relative to a longitudinal axis of the hinge; and
a reflective surface on the upper surface of the mirror plate and above a portion of the hinge, the reflective surface having an area greater than an area of the upper surface of the mirror plate.
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Abstract
A micro mirror array having a hidden hinge that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a hinge, a mirror plate and a reflective surface on the upper surface of the mirror plate, the reflective surface concealing the hinge and the mirror plate. The micro mirror array fabricated from a single material.
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Citations
38 Claims
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1. A micro mirror comprising:
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a mirror plate having an upper surface and a lower surface;
a hinge connected to the mirror plate for allowing the mirror plate to rotate relative to a longitudinal axis of the hinge; and
a reflective surface on the upper surface of the mirror plate and above a portion of the hinge, the reflective surface having an area greater than an area of the upper surface of the mirror plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An array of micro mirrors, comprising:
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a plurality of mirror plates, a mirror plate having an upper surface and a lower surface;
a plurality of hinges, a hinge coupled to the mirror plate for allowing the mirror plate to rotate relative to the spacer support frame about an axis defined by the hinge; and
a plurality of reflective surfaces, a reflective surface on the upper surface of the mirror plate and above a portion of the hinge, the reflective surface having an area greater than an area of the upper surface of the mirror plate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An array of a plurality of micro mirrors, comprising:
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a first micro mirror comprising a first mirror plate having a first upper surface and a first lower surface, a first hinge connected to the first mirror plate for allowing the first mirror plate to rotate relative to a longitudinal axis of the first hinge, and a first reflective surface on the first upper surface of the first mirror plate and above the first hinge, the first reflective surface having an area greater than an area of the first upper surface of the first mirror plate; and
a second micro mirror comprising a second mirror plate having a second upper surface and a second lower surface, a second hinge connected to the second mirror plate for allowing the second mirror plate to rotate relative to a longitudinal axis of the second hinge, and a second reflective surface on the second upper surface of the second mirror plate and above the second hinge, the second reflective surface having an area greater than an area of the second upper surface of the first mirror plate. - View Dependent Claims (29, 30, 31, 32)
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33. A method of operating a micro mirror array, comprising:
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selecting a micro mirror to deflect in the array;
applying a voltage to an electrode corresponding to the selected micro mirror causing the micro mirror to rotate about a hinge, the hinge positioned substantially beneath an upper surface and under a reflective surface of the micro mirror, and permitting light striking the micro mirror to be reflected in a desired direction; and
wherein the micro mirror further has a mirror plate upon which the reflective surface is deposited and a spacer support frame, each of the hinge, mirror plate and spacer support frame are fabricated from a single piece of material. - View Dependent Claims (34, 35)
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36. A spatial light modulator, comprising:
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means for selecting a micro mirror to deflect in an array of micro mirrors;
means for applying a voltage to an electrode corresponding to the selected micro mirror causing the micro mirror to rotate about a hinge, the hinge positioned substantially beneath an upper surface and under a reflective surface of the micro mirror, and permitting light striking the micro mirror to be reflected in a desired direction; and
wherein the micro mirror further has a mirror plate upon which the reflective surface is deposited and a spacer support frame, each of the hinge, mirror plate and spacer support frame are fabricated from a single piece of material. - View Dependent Claims (37)
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38. A spatial light modulator, comprising:
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means for deflecting having an upper surface;
means for rotating the deflecting means about an axis; and
means for reflecting light, the reflecting means deposited on the upper surface of the deflecting means and above the rotating means to substantially conceal the rotating means.
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Specification