Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal
First Claim
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1. An elongated cathode target comprising titanium and aluminum in the range of 1 to 99 weight percent titanium and 1 to 99 weight percent aluminum.
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Abstract
Titanium and aluminum cathode targets are disclosed for sputtering absorbing coatings of titanium and aluminum-containing materials in atmospheres comprising inert gas, reactive gases such as nitrogen, oxygen, and mixtures thereof, which can further comprise inert gas, such as argon, to form nitrides, oxides, and oxynitrides, as well as metallic films. The titanium and aluminum-containing coatings can be utilized as an outer coat or as one or more coating layers of a coating stack.
85 Citations
34 Claims
- 1. An elongated cathode target comprising titanium and aluminum in the range of 1 to 99 weight percent titanium and 1 to 99 weight percent aluminum.
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7. A method for depositing coatings comprising titanium and aluminum, comprising:
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a. maintaining a substrate in an evacuated chamber;
b. maintaining an atmosphere comprising a gas selected from the group consisting of inert gas, nitrogen, oxygen, and mixtures thereof; and
c. sputtering an elongated cathode target comprising 1 to 99 weight percent titanium and 1 to 99 weight percent aluminum, to deposit a titanium and aluminum containing coating on a surface of the substrate. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 23)
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20. A coating article, comprising:
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a substrate;
a functional coating deposited over at least a portion of the substrate; and
a Ti—
Al coating comprising titanium and aluminum deposited over at least a portion of the functional coating. - View Dependent Claims (21, 22, 24, 25, 26)
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27. A coated article, comprising:
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a substrate;
a functional coating deposited over at least a portion of the substrate, wherein the functional coating comprises at least one dielectric layer, at least one infrared reflective layer deposited over the dielectric layer, and at least one primer film deposited over at least a portion of the infrared reflective layer; and
a Ti—
Al layer comprising titanium and aluminum incorporated into the functional coating. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34)
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Specification