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Substrates coated with mixtures of titanium and aluminum materials, methods for making the substrates, and cathode targets of titanium and aluminum metal

  • US 20040241490A1
  • Filed: 03/25/2004
  • Published: 12/02/2004
  • Est. Priority Date: 03/28/2003
  • Status: Abandoned Application
First Claim
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1. An elongated cathode target comprising titanium and aluminum in the range of 1 to 99 weight percent titanium and 1 to 99 weight percent aluminum.

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  • 4 Assignments
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