Temperature controlled shield ring
First Claim
Patent Images
1. A temperature-controlled shield ring, comprising:
- a shield ring for surrounding a substrate holder; and
coolant passageways within a portion of the shield ring for controlling a temperature of the shield ring by passing a coolant through the coolant passageways.
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Accused Products
Abstract
A method and apparatus for transferring heat from an outer edge of a substrate holder to a temperature-controlled shield ring surrounding the substrate in a plasma reactor. Additionally, heat may be transferred from an edge of the substrate to the shield ring as well.
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Citations
8 Claims
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1. A temperature-controlled shield ring, comprising:
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a shield ring for surrounding a substrate holder; and
coolant passageways within a portion of the shield ring for controlling a temperature of the shield ring by passing a coolant through the coolant passageways. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification