[CHIP STRUCTURE]
First Claim
1. A chip structure, comprising:
- a chip having a first passivation layer and at least a bonding pad, wherein the bonding pad is exposed by the first passivation layer and the first passivation layer has at least a recess;
a redistribution layer formed over the first passivation layer, wherein the redistribution layer electrically connects with the bonding pad and extends from the bonding pad to the recess;
a second passivation layer formed over the first passivation layer and the redistribution layer, wherein the second passivation layer has an opening that exposes the redistribution layer above the recess; and
at least a bump disposed inside the opening and electrically connected to the redistribution layer above the recess.
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Accused Products
Abstract
A chip structure comprising a chip, a redistribution layer, a second passivation layer and at least a bump is provided. The chip has a first passivation layer and at least a bonding pad. The first passivation layer exposes the bonding pad and has at least a recess. The redistribution layer is formed over the first passivation layer and electrically connected to the bonding pad. Furthermore, the redistribution layer also extends from the bonding pad to the recess. The second passivation layer is formed over the first passivation layer and the redistribution layer. The second passivation layer also has an opening that exposes the redistribution layer above the recess. The bump passes through the opening and connects electrically with the redistribution layer above the recess.
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Citations
20 Claims
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1. A chip structure, comprising:
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a chip having a first passivation layer and at least a bonding pad, wherein the bonding pad is exposed by the first passivation layer and the first passivation layer has at least a recess;
a redistribution layer formed over the first passivation layer, wherein the redistribution layer electrically connects with the bonding pad and extends from the bonding pad to the recess;
a second passivation layer formed over the first passivation layer and the redistribution layer, wherein the second passivation layer has an opening that exposes the redistribution layer above the recess; and
at least a bump disposed inside the opening and electrically connected to the redistribution layer above the recess. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
a first metallic layer formed over the opening-exposed redistribution layer; and
a second metallic layer formed over the first metallic layer.
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5. The chip structure of claim 4, wherein a material constituting the first metallic layer is selected from the group consisting of aluminum, titanium, titanium-tungsten alloy, tantalum, tantalum nitride and chromium.
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6. The chip structure of claim 4, wherein a material constituting the second metallic layer comprises copper.
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7. The chip structure of claim 4, wherein the under-bump-metallurgy layer further comprises at least an electroplated layer formed over the second metallic layer and the electroplated layer is selected from the group consisting of an electroplated copper layer, an electroplated nickel layer, an electroless nickel layer, an electroless plated gold layer and combination thereof.
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8. The chip structure of claim 3, wherein the under-bump-metallurgy layer further comprises:
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a first metallic layer formed over the opening-exposed redistribution layer;
a second metallic layer formed over the first metallic layer; and
a third metallic layer formed over the second metallic layer.
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9. The chip structure of claim 8, wherein a material constituting the first metallic layer is selected from the group consisting of aluminum, titanium, titanium-tungsten alloy, tantalum, tantalum nitride and chromium.
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10. The chip structure of claim 8, wherein a material constituting the second metallic layer is selected from the group consisting of nickel-vanadium alloy and copper-chromium alloy.
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11. The chip structure of claim 8, wherein a material constituting the third metallic layer comprises copper.
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12. The chip structure of claim 8, wherein the under-bump-metallurgy layer further comprises at least an electroplated layer formed over the third metallic layer and the electroplated layer is selected from the group consisting of an electroplated copper layer, an electroplated nickel layer, an electroplated gold layer and combination thereof.
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13. The chip structure of claim 1, wherein the redistribution layer further comprises:
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a first metallic layer formed over the first passivation layer; and
a second metallic layer formed over the first metallic layer.
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14. The chip structure of claim 13, wherein a material constituting the first metallic layer is selected from the group consisting of aluminum, titanium, titanium-tungsten alloy, tantalum, tantalum nitride and chromium.
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15. The chip structure of claim 13, wherein a material constituting the second metallic layer comprises copper.
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16. The chip structure of claim 1, wherein the redistribution layer further comprises:
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a first metallic layer formed over the first passivation layer;
a second metallic layer formed over the first metallic layer; and
a third metallic layer formed over the second metallic layer.
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17. The chip structure of claim 16, wherein a material constituting the first metallic layer is selected from the group consisting of aluminum, titanium, titanium-tungsten alloy, tantalum, tantalum nitride and chromium.
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18. The chip structure of claim 16, wherein a material constituting the second metallic layer is selected from the group consisting of nickel-vanadium alloy and copper-chromium alloy.
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19. The chip structure of claim 16, wherein a material constituting the third metallic layer comprises copper.
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20. The chip structure of claim 1, wherein an obtuse angle is formed between a sidewall of the opening and a bottom surface of the opening.
Specification