Method for supporting a bond pad in a multilevel interconnect structure and support structure formed thereby
First Claim
1. A method for manufacturing a multi-level interconnect structure with structural support for a bond pad, comprising:
- applying a mandrel material to a substrate;
forming a damascene pattern in the mandrel material by removing portions of the mandrel material, the damascene pattern including a closed channel surrounding a core of the mandrel material;
filling the damascene pattern with a conductive material to create a plurality of features having the mandrel material disposed between adjacent features and a support pillar defined by conductive material filling the closed channel and surrounding the core of the mandrel material; and
removing the mandrel material between adjacent features to leave air-filled voids between adjacent features, the support pillar providing vertical support to an overlying bond pad that is electrically coupled with at least one of the features.
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Accused Products
Abstract
A method for forming interlevel dielectric levels in a multilevel interconnect structure formed by a damascene process. The conductive features characteristic of the damascene process are formed in a removable mandrel material for each level of the interconnect structure. In at least one level, a portion of the mandrel material underlying the bond pad is clad on all sides with the metal forming the conductive features to define a support pillar. After all levels of the interconnect structure are formed, the mandrel material surrounding the conductive features is removed to leave air-filled voids that operate as an interlevel dielectric. The support pillar is impermeable to the etchant such that mandrel material and metal inside the support pillar is retained. The support pillar braces the bond pad against vertical mechanical forces applied by, for example, probing or wire bonding and thereby reduces the likelihood of related damage to the interconnect structure.
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Citations
32 Claims
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1. A method for manufacturing a multi-level interconnect structure with structural support for a bond pad, comprising:
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applying a mandrel material to a substrate;
forming a damascene pattern in the mandrel material by removing portions of the mandrel material, the damascene pattern including a closed channel surrounding a core of the mandrel material;
filling the damascene pattern with a conductive material to create a plurality of features having the mandrel material disposed between adjacent features and a support pillar defined by conductive material filling the closed channel and surrounding the core of the mandrel material; and
removing the mandrel material between adjacent features to leave air-filled voids between adjacent features, the support pillar providing vertical support to an overlying bond pad that is electrically coupled with at least one of the features. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A multilevel interconnect structure comprising:
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a plurality of damascene features filled by a conductive material, adjacent pairs of the plurality of damascene features separated by one of a plurality of air-filled voids;
a bond pad electrically coupled with at least one of said plurality of damascene features; and
a support pillar underlying said bond pad, said support pillar including a core of a mandrel material and a tubular outer layer formed of the conductive material, said outer layer surrounding said core of said mandrel material for protecting said core against an etching used to remove regions of said mandrel material from between adjacent pairs of said plurality of damascene features to provide said plurality of air-filled voids. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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- 29. The multilevel interconnect structure of claim 29 wherein said cap contains said conductive material.
Specification