Deformable MEMS mirror
First Claim
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1. A MEMS device, comprising:
- a deformable membrane movably connected to a support structure; and
one or more actuators configured between the membrane and the support structure, each actuator adapted to apply torque to the membrane to change the shape of the membrane.
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Abstract
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
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Citations
20 Claims
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1. A MEMS device, comprising:
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a deformable membrane movably connected to a support structure; and
one or more actuators configured between the membrane and the support structure, each actuator adapted to apply torque to the membrane to change the shape of the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of deforming a membrane in a MEMS device, comprising:
applying torque to the membrane using an actuator configured to change the shape of the membrane, wherein;
the membrane is movably connected to a support structure; and
one or more actuators are configured between the membrane and the support structure, each actuator adapted to apply torque to the membrane.
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20. A MEMS device, comprising:
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a deformable membrane movably connected to a support structure; and
means for applying torque to the membrane to change the shape of the membrane, said means configured between the membrane and the support structure.
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Specification