SYSTEMS AND METHODS FOR OVERCOMING STICTION
1 Assignment
0 Petitions
Accused Products
Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
-
Citations
68 Claims
-
1. -64. (Canceled).
-
65. An optical routing apparatus comprising a moveable micromirror, the optical routing apparatus comprising:
-
a base layer;
a stop disposed over the base layer;
a structural plate supported above the base layer by a pivot, wherein the structural plate is deflectable to contact the stop; and
an actuator disposed near the stop, wherein application of an AC voltage to the actuator causes the stop to oscillate at a frequency at or about the frequency of the AC voltage, and wherein the oscillation is sufficient to overcome stiction related forces between the stop and the structural plate. - View Dependent Claims (66, 67)
-
-
68. -91. (Canceled)
Specification