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Lithographic support structure

  • US 20040246459A1
  • Filed: 03/31/2004
  • Published: 12/09/2004
  • Est. Priority Date: 03/31/2003
  • Status: Active Grant
First Claim
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1. A lithographic support system, comprising:

  • a moveable support structure configured to support and move an object, said support structure comprising a clamp that clamps the substrate; and

    a compliant structure configured to compensate for at least one of a tilt and displacement between said object and said clamp.

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