×

Micromirror actuator

  • US 20040246558A1
  • Filed: 12/17/2001
  • Published: 12/09/2004
  • Est. Priority Date: 05/12/2001
  • Status: Active Grant
First Claim
Patent Images

1. A micromirror actuator comprising:

  • a substrate;

    a trench in which at least one electrode is formed;

    supporting posts installed at opposite sides of the trench;

    a torsion bar supported by the supporting posts;

    a micromirror including a driving unit which faces the trench when the micromirror is in a horizontal state, and a reflecting unit which is elastically rotated about the torsion bar to reflect an optical signal; and

    a shielding electrode installed to face the reflecting unit when the micromirror is in the horizontal state and to block an electrostatic force occurring between the reflecting unit and the at least one electrode.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×