Mirror substrate, mirror body using the same, and optical device using mirror body
First Claim
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1. A mirror substrate, wherein the substrate is made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate to be used as a reflecting surface is polished to mirror finish.
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Abstract
The present invention adopts a particle dispersed silicon material, comprising silicon carbide as dispersion particles, as a mirror substrate, subjects the mirror substrate to mirror finish polishing to form a mirror body, forms a reflecting film on the mirror body to form a mirror, and uses the mirror to form a large aperture optical system.
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Citations
20 Claims
- 1. A mirror substrate, wherein the substrate is made of a particle-dispersed silicon material composed of silicon carbide and silicon, and the surface of said substrate to be used as a reflecting surface is polished to mirror finish.
Specification