Method and composition for fine copper slurry for low dishing in ECMP
First Claim
1. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
- positioning the substrate in a process apparatus;
exposing the substrate to a first polishing composition;
applying a first bias to the substrate;
removing at least 50% of the conductive material layer;
exposing the substrate to a second polishing composition and a second bias; and
continuing to remove the conductive material layer.
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Accused Products
Abstract
A method of processing a substrate having a conductive material layer disposed thereon is provided which includes positioning the substrate in a process apparatus and supplying a first polishing composition between to the substrate. The polishing composition comprises phosphoric acid, at least one chelating agent, a corrosion inhibitor, a salt, an oxidizer, abrasive particulates, at least one pH adjusting agent to provide a pH from about 4 to about 7 and a solvent. The method further includes forming a passivation layer on the conductive material layer, abrading the passivation layer to expose a portion of the conductive material layer, applying a first bias to the substrate, and removing at least about 50% of the conductive material layer. The method further includes separating the substrate from the first polishing composition, exposing the substrate to a second polishing composition and a second bias, and continuing to remove the conductive material layer.
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Citations
57 Claims
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1. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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positioning the substrate in a process apparatus;
exposing the substrate to a first polishing composition;
applying a first bias to the substrate;
removing at least 50% of the conductive material layer;
exposing the substrate to a second polishing composition and a second bias; and
continuing to remove the conductive material layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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positioning the substrate in a process apparatus;
exposing the substrate to a first polishing composition comprising phosphoric acid, at least one chelating agent, a corrosion inhibitor, a salt, an oxidizer, and abrasive particulates;
applying a first bias to the substrate;
removing at least 50% of the conductive material layer;
exposing the substrate to a second polishing composition and a second bias; and
continuing to remove the conductive material layer. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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positioning the substrate in a process apparatus comprising a first electrode and a second electrode;
supplying a first polishing composition between the first electrode and the substrate, wherein the polishing composition comprises phosphoric acid, at least one chelating agent, a corrosion inhibitor, a salt, an oxidizer, abrasive particulates, at least one pH adjusting agent to provide a pH from about 4 to about 7, and a solvent;
forming a passivation layer on the conductive material layer;
abrading the passivation layer to expose a portion of the conductive material layer;
applying a first bias between the first electrode and the second electrode;
removing at least about 50% of the conductive material layer;
separating the substrate from the first polishing composition;
exposing the substrate to a second polishing composition and a second bias; and
continuing to remove the conductive material layer. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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44. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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providing the substrate to a process apparatus;
exposing the substrate to a first polishing composition, wherein the first polishing composition comprises;
from about 1 wt % to about 10 wt % of phosphoric acid;
from about 0.1 wt % to about 6 wt % of at least one chelating agent;
from about 0.01 wt % to about 1 wt % of a corrosion inhibitor;
from about 0.5 wt % to about 10 wt % of a salt;
from about 0.2 wt % to about 5 wt % of an oxidizer;
from about 0.05 wt % to about 1 wt % of an abrasive particulates;
at least one pH adjusting agent to provide a pH from about 4 to about 7; and
a solvent;
applying a first bias to the substrate;
removing at least 50% of the conductive material layer; and
exposing the substrate to a second polishing composition and a second bias to continue removing the conductive layer, wherein the second polishing composition comprises;
about 0.1 wt % to about 5 wt % of phosphoric acid;
from about 0.1 wt % to about 5 wt % of at least one chelating agent; and
from about 0.01 wt % to about 1 wt % of the corrosion inhibitor. - View Dependent Claims (45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55)
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56. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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positioning the substrate in a process apparatus;
exposing the substrate to a first polishing composition with a first conductivity in a range from about 30 mS to about 60 mS and comprising an oxidizer and abrasive particulates;
applying a first bias to the substrate;
exposing the substrate to a second polishing composition with a second conductivity in a range from about 15 mS to about 40 mS;
applying a second bias to the substrate; and
continuing to remove the conductive layer.
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57. A method of processing a substrate having a conductive material layer disposed thereon, comprising:
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positioning the substrate in a process apparatus;
exposing the substrate to a first polishing composition comprising phosphoric acid, at least one chelating agent, a corrosion inhibitor, a salt, an oxidizer, abrasive particulates, at least one pH adjusting agent to provide a pH from about 4 to about 7, and a solvent;
applying a first bias to the substrate;
exposing the substrate to a second polishing composition comprising phosphoric acid, at least one chelating agent, a corrosion inhibitor, abrasive particulates, at least one pH adjusting agent to provide a pH from about 4 to about 7, and a solvent;
applying a second bias to the substrate; and
continuing to remove the conductive layer.
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Specification