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Method and composition for fine copper slurry for low dishing in ECMP

  • US 20040248412A1
  • Filed: 05/14/2004
  • Published: 12/09/2004
  • Est. Priority Date: 06/06/2003
  • Status: Abandoned Application
First Claim
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1. A method of processing a substrate having a conductive material layer disposed thereon, comprising:

  • positioning the substrate in a process apparatus;

    exposing the substrate to a first polishing composition;

    applying a first bias to the substrate;

    removing at least 50% of the conductive material layer;

    exposing the substrate to a second polishing composition and a second bias; and

    continuing to remove the conductive material layer.

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