Pressure-measuring configuration, with a throughplating through a separator located between a diaphragm and a base, as well as a process for providing the electrical contact

• US 20040250627A1
• Filed: 05/04/2004
• Published: 12/16/2004
• Est. Priority Date: 05/08/2003
• Status: Active Grant

• Current Assignee: VEGA Grieshaber KG (Grieshaber Verwaltungsgesellschaft mbH)
• Original Assignee: VEGA Grieshaber KG (Grieshaber Verwaltungsgesellschaft mbH)
• Inventors: Jacob, Joern
• Granted Patent: US 7,066,030 B2
• Time in Patent Office: Days
• US Class Current: 73/723
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

The invention relates to a process for providing a contact to a diaphragm electrode (6) that belongs to a pressure-measuring configuration, involving the following stages: the connection of a diaphragm (3) on which the diaphragm electrode (6) is positioned to a base (1) by means of a connecting element (2) made of an electrically insulating material running between the two, where the base exhibits a throughplating hole (7, 10) between an attachment point (8) and a connecting point (9) for the electrically insulating material, and the connecting element (2) exhibits a connecting element throughplating (11) between the connecting point (9) and the diaphragm or the diaphragm electrode; the provision of conductive contact material (13) in the throughplating hole (7, 10); and the activation of the contact material (13) by heating. To prepare a simple throughplating (11) through the connecting element (2) without the formation of an opening that weakens the material and without the need for aligning the diaphragm, connecting element, and base with respect to the throughplating holes, it is proposed that the employed contact material (13) is a material from which ions penetrate the insulating material upon heating and render this insulating material conductive, thereby forming a connecting element throughplating (11). The invention also relates to a measuring configuration produced in this way.

Claims

1. A process for providing a contact for a diaphragm electrode (6) belonging to a pressure-measuring configuration, involving the following stages:

the connection of a diaphragm (3) on which the diaphragm electrode (6) is positioned to a base (1) by means of a connecting element (2) made of an electrically insulating material and running between the two, where the base (1) exhibits a throughplating hole (7, 10) between an attachment point (8) and a connecting point (9) leading to the electrically insulating material (2),

and the connecting element (2) exhibits a connecting element through contact (11) between the connecting point (9) and the diaphragm (3), or diaphragm electrode (6)

the provision of a conductive contact material (13) in the throughplating (7, 10), and

the activation, particularly solidification, by allowing the contact material (13) to heat up, wherein the contact material (13) employed is a material from which ions penetrate the electrically insulating material upon activation, particularly upon heating, and render the electrically insulating material conductive while forming a connecting element throughplating (11)

2. A process according to claim 1, in which the electrically insulating material employed in the connecting element (2) is glass, particularly glass solder.

3. A process according to claim 1, in which the employed contact material (13) is a paste containing silver, particularly silver paste or silver-palladium paste.

4. A process according to claim 1, in which the contact material (13), following assembly and solidification of the diaphragm (3), connecting element (2), and base (1), is filled into the throughplating through the base (1), which throughplating takes the form of a throughplating hole (7, 10).

5. A process according to claim 1, in which upon activation of the contact material (13) a field, specifically an electrical or electromagnetic filed, is applied over at least the area of the connecting element throughplating (11) to provide directed penetration of the ions.

6. A pressure-measuring configuration, with

a diaphragm (3),

at least one electrode (6) positioned on the diaphragm (3),

a base (1),

a connecting element (2) made of an electrically insulating material between diaphragm (3) and base (1),

a base throughplating (7, 10) from an attachment point (8) on the base (1) to a connecting point (9) between the base (1) and the connecting element (2), and

a connecting element throughplating (11) extending from an attachment point (12) on the diaphragm (3), or an electrode (6) on the diaphragm (3) and the connecting element (2), through the connecting element (2), to the connecting point (9) leading to the base (1), wherein the connecting element throughplating (11) is formed from an electrically conductive section with conductive ions in a material that otherwise has an electrically insulating character.

7. A measuring configuration according to claim 6, in which the base throughplating (7, 10) contains an electrically conductive contact material (13) which releases ions when activated, particularly when heated.

8. A measuring configuration according to claim 6, in which the contact material (13) contains silver, and specifically is a silver paste or a silver-palladium paste.

9. A measuring configuration according to claim 6, in which the electrically insulating material of the connecting element (2) is glass, particularly hardened glass solder.

10. A measuring configuration according to claim 6, in which the connecting element throughplating (11) exhibits ions originally deriving from the contact material (13).