SUSPENDED THIN-FILM RESISTOR
First Claim
Patent Images
1. A device produced by:
- depositing a first and second contact on a substrate;
depositing a sacrificial material, on the substrate at a location between the first and second contacts;
depositing a thin-film resistor over the first and second contacts and the sacrificial material; and
thermally decomposing the sacrificial material.
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Abstract
A suspended thin-film resistor and methods for producing the same are disclosed. In one embodiment, a device is produced by depositing a first and second contact on a substrate, depositing a sacrificial material on the substrate at a location between the first and second contacts, depositing a thin-film resistor over the first and second contacts and the sacrificial material, and thermally decomposing the sacrificial material.
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Citations
22 Claims
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1. A device produced by:
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depositing a first and second contact on a substrate;
depositing a sacrificial material, on the substrate at a location between the first and second contacts;
depositing a thin-film resistor over the first and second contacts and the sacrificial material; and
thermally decomposing the sacrificial material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 16)
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11. A device comprising:
a substrate supporting first and second contacts;
a thin-film resistor deposited on the first and second contacts, a section of the thin-film resistor between the first and second contacts being suspended above the substrate. - View Dependent Claims (12, 13, 14, 15)
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17. A method comprising:
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depositing a first and second contact on a substrate;
depositing a sacrificial material on the substrate and the first and second contacts, at a location between the first and second contacts;
depositing a thin-film resistor over the first and second contacts and the sacrificial material; and
thermally decomposing the sacrificial material. - View Dependent Claims (18, 19)
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20. A switch comprising:
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first and second mated substrates defining therebetween at least portions of a number of cavities;
a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid;
an actuating fluid, held within one or more of the cavities, that applies said forces to said switching fluid;
first and second contacts, deposited on the first substrate at a location that is within one of the cavities holding the actuating fluid; and
a thin-film resistor heater, deposited on the first and second contacts, a section of the thin-film resistor heater between the first and second contacts being suspended above the first substrate. - View Dependent Claims (21, 22)
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Specification