×

METHOD FOR HIGH PRECISION PRINTING OF PATTERNS

  • US 20040251430A1
  • Filed: 06/12/2003
  • Published: 12/16/2004
  • Est. Priority Date: 06/12/2003
  • Status: Active Grant
First Claim
Patent Images

1. A method for printing fine patterns with high precision, comprising the actions of:

  • providing an SLM having an array of modulator elements, providing an electromagnetic radiation source to illuminate said SLM with partially coherent illumination with a coherence length that is larger than half the pitch of the modulating elements in the SLM, creating a negative complex amplitude with at least one modulator element.

View all claims
  • 7 Assignments
Timeline View
Assignment View
    ×
    ×