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Micromachine and method of fabricating the same

  • US 20040251793A1
  • Filed: 04/30/2004
  • Published: 12/16/2004
  • Est. Priority Date: 05/13/2003
  • Status: Active Grant
First Claim
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1. A micromachine comprising:

  • an insulating layer formed on a substrate;

    a first electrode for signal input formed on said insulating layer;

    a second electrode for signal output formed on said insulating layer; and

    an oscillator electrode formed as being opposed with said first electrode and said second electrode while being spaced therefrom by an air gap, wherein said insulating layer has a groove formed therein at least between said first electrode and said second electrode.

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