Micromachine and method of fabricating the same
First Claim
1. A micromachine comprising:
- an insulating layer formed on a substrate;
a first electrode for signal input formed on said insulating layer;
a second electrode for signal output formed on said insulating layer; and
an oscillator electrode formed as being opposed with said first electrode and said second electrode while being spaced therefrom by an air gap, wherein said insulating layer has a groove formed therein at least between said first electrode and said second electrode.
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Accused Products
Abstract
A micromachine successfully reduced in parasitic capacity between input and output electrodes, and having an oscillator configured as ensuring a high S/N ratio under operation at higher frequencies is disclosed. The micromachine comprises an insulating layer formed on a substrate; a first electrode for signal input formed on the insulating layer; a second electrode for signal output formed on the insulating layer; and an oscillator electrode formed as being opposed with the first electrode and the second electrode and as being spaced therefrom by an air gap, wherein the insulating layer has a groove formed therein at least between the first electrode and the second electrode.
36 Citations
6 Claims
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1. A micromachine comprising:
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an insulating layer formed on a substrate;
a first electrode for signal input formed on said insulating layer;
a second electrode for signal output formed on said insulating layer; and
an oscillator electrode formed as being opposed with said first electrode and said second electrode while being spaced therefrom by an air gap, wherein said insulating layer has a groove formed therein at least between said first electrode and said second electrode. - View Dependent Claims (2, 3)
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4. A method of fabricating a micromachine comprising the steps of:
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forming an insulating layer on a substrate and forming a groove in said insulating layer;
forming a first sacrificial layer so as to fill said groove;
forming a first electrode for signal input on said insulating layer on one side of said groove, forming a second electrode for signal output on said insulting layer on the other side of said groove, and further forming wiring portions of an oscillator electrode as being opposed with said groove while placing said first electrode and said second electrode in between, and being spaced from said first electrode and said second electrode;
filling a space between said first electrode and said second electrode with a second sacrificial layer;
forming a third sacrificial layer on individual surfaces of said first electrode and said second electrode;
forming an oscillator electrode electrically connected with said wiring portions as extending over said first electrode and said second electrode while placing said third sacrificial layer thereunder; and
removing said first sacrificial layer, said second sacrificial layer and said third sacrificial layer. - View Dependent Claims (5, 6)
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Specification