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Sputter target

  • US 20040253382A1
  • Filed: 03/11/2004
  • Published: 12/16/2004
  • Est. Priority Date: 08/13/2001
  • Status: Abandoned Application
First Claim
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1. A sputter target comprising a target holder having an outer surface and a target material formed on said outer surface, said target material comprising a metal, a metal alloy or a metal oxide;

  • said target material having a relative density higher than 92% of the theoretical density of the metal or metal alloy.

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