Operation monitoring method for treatment apparatus
First Claim
1. An operation monitoring method for monitoring an operation of a processing system by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in the processing system, wherein a multivariate analysis using the operation data is carried out to evaluate an operation state of the processing system.
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Abstract
In an operation monitoring method according to the present invention, operation data of a plasma processing system (1) are detected for every wafer (W) by means of a plurality of detectors, and a principal component analysis using the operation data is carried out by means of a controller (10). An operation state of the plasma processing system (1) is evaluated by using the results of the principal component analysis.
44 Citations
20 Claims
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1. An operation monitoring method for monitoring an operation of a processing system by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in the processing system,
wherein a multivariate analysis using the operation data is carried out to evaluate an operation state of the processing system.
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3. An operation monitoring method for monitoring an operation of a plasma processing system by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in the plasma processing system, the method comprising the steps of:
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obtaining previously a plurality of operation data with respect to a plurality of objects to be processed as references;
carrying out a principal component analysis using the operation data;
evaluating an operation state of the plasma processing system on the basis of results of the principal component analysis. - View Dependent Claims (4, 5, 6)
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7. An operation monitoring method for monitoring an operation of a processing system by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in the processing system, the method comprising the steps of:
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dividing the operation data into relatively high contribution principal components and low contribution principal components;
deriving a residual matrix of operation data belonging to the low contribution principal components; and
evaluating an operation state of the processing system on the basis of a residual score obtained by the residual matrix.
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8. A processing system evaluating method for evaluating a difference in characteristics between a plurality of processing systems by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in each processing system, the method comprising the steps of:
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obtaining first operation data for each of a plurality of objects to be processed by using a reference processing system;
carrying out a multivariate analysis using the first operation data;
obtaining second operation data for each of the objects to be processed by using a comparative processing system to be compared with the reference processing system;
obtaining an analyzed result wherein the second operation data are adapted to results of the multivariate analysis; and
comparing results of analysis based on the first operation data with the results of analysis based on the second operation data to evaluate a difference in performance between the processing systems.
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9. A processing system evaluating method for evaluating a difference in characteristics between a plurality of processing systems by utilizing a plurality of detected values as operation data, the detected values being detected for every object to be processed by means of a plurality of detectors provided in the processing systems, the method comprising the steps of:
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obtaining first operation data for each of the objects to be processed by using a reference processing system;
carrying out a principal component analysis using the first operation data to derive a first residual matrix;
obtaining second operation data for each of the objects to be processed by using a comparative processing system to be compared with the reference processing system;
adapting the second operation data to results of the principal component analysis to derive a second residual matrix; and
comparing the first residual matrix based on the first operation data with the second residual matrix based on the second operation data to evaluate a difference in performance between the processing systems. - View Dependent Claims (10)
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11. A processing system monitoring method for measuring a plurality of electrical data of a high frequency source varying in accordance with a state in a processing system, by means of a measuring device, when a high frequency power is applied to an electrode in a processing vessel from the high frequency source for processing an object with plasma in the processing system, and for carrying out a multivariate analysis using the measured electrical data to detect a power application state of the high frequency source, the method comprising the steps of:
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measuring the electrical data as reference data when the power application state of the high frequency source is stabilized in accordance with the state in the processing vessel in a reference processing system;
carrying out a multivariate analysis for reference using the obtained reference data;
measuring successively the electrical data as comparative data in a comparative processing system to be monitored, after the system is started;
carrying out a multivariate analysis for comparison using the obtained comparative data; and
comparing a results of the multivariate analysis for comparison with a result of the multivariate analysis for reference to determine, on the basis of a difference therebetween, whether the power application state of the high frequency source in the comparative processing system reaches a stable condition in accordance with the state in the processing vessel. - View Dependent Claims (12, 13, 14, 15)
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16. An abnormality detecting method for detecting an abnormality of a processing system by measuring a plurality of electrical data of a high frequency source varying in accordance with a state in the processing system, by means of a measuring device, when a high frequency power is applied to an electrode in a processing vessel from the high frequency source for processing an object with plasma in the processing system, and by carrying out a multivariate analysis using the measured electrical data to detect a power application state of the high frequency source, the method comprising the steps of:
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measuring the electrical data as reference data when the power application state of the high frequency source is stabilized in accordance with the state in the processing vessel in a normal reference processing system;
carrying out a multivariate analysis for reference using the obtained reference data;
measuring the electrical data as comparative data in a comparative processing system, the abnormality of which is to be detected;
carrying out a multivariate analysis for comparison using the obtained comparative data; and
comparing a result of the multivariate analysis for comparison with a result of the multivariate analysis for reference to detect the abnormality of the comparative processing system on the basis of a difference therebetween. - View Dependent Claims (17, 18, 19, 20)
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Specification