Accelerometer with folded beams

• US 20040255675A1
• Filed: 07/22/2004
• Published: 12/23/2004
• Est. Priority Date: 06/21/2000
• Status: Abandoned Application

• Current Assignee: Input/Output Incorporated
• Original Assignee: Input/Output Incorporated
• Inventors: Jones, Ben W., Yu, Duli, Yu, Lianzhong, Selvakumar, Arjun
• Application Number:
  US10/897,147
• Publication Number:
  US 20040255675A1
• Time in Patent Office: Days
• US Class Current: 73/526
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/0163 Spring holders
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0072 For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
• CPC Class Codes: B81B 7/0016 Protection against shocks or vibrations, e.g. vibration damping
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01V 1/181 Geophones

Abstract

Disclosed is an accelerometer for measuring seismic data. The accelerometer includes a proof mass that is resiliently coupled to a support structure by folded beams, S-shaped balanced beams, straight beams, and/or folded beams with resonance damping. The support structure further includes travel stops for limiting transverse motion of the proof mass.

Claims

1-43. -43. (canceled)

44. A method of preventing crack propagation in a micro-machined structure including a webbing artifact, comprising:

providing one or more holes within the webbing artifact.

45. A method of minimizing backside etching of elements within a micro-machined structure, comprising:

providing one or more etch-buffers adjacent to the elements.

46. A method of improving the dimensional uniformity of elements within a micro-machined structure, comprising:

providing one or more etch-buffers adjacent to the elements.

47. A method of protecting a mass supported within a support structure by one or more springs, comprising:

providing one or more soft-contact bumpers for preventing impacts between the mass and the support structure.

48-56. -56. (canceled)