Lithographic apparatus, device manufacturing method and computer program
First Claim
1. A lithographic projection apparatus comprising:
- a support structure for supporting a patterning device, the patterning device serving to pattern a projection beam according to a desired pattern;
a substrate table for holding a substrate;
a projection system for projecting the patterned beam onto a target portion of the substrate; and
a positioning system for positioning an object, selected from the group consisting of the support structure and the substrate table, said positioning system having a long stroke module and a short stroke module in series and a control system for controlling the long stroke and short stroke modules to move the positioned object along a desired course at desired speeds;
wherein said control system is adapted to control said long and short stroke modules to apply a desired acceleration to said object by controlling said short stroke module to apply said desired acceleration to said object and to control said long stroke module to apply a smaller acceleration.
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Accused Products
Abstract
In a scanning exposure, the short stroke module accelerates the mask or substrate table with a higher acceleration that the long stroke module. The short stroke module starts at or near (proximate) one extreme of its range of motion and catches up to the long stroke module during the scan. The long stroke module starts to decelerate earlier but the short stroke decelerates faster so that the short stroke overtakes the long stroke and ends up at the other extreme of its range of motion. The acceleration times can be reduced without increasing the forces exerted by the long stroke actuators so there is less of an increase in dissipation and reaction forces.
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Citations
9 Claims
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1. A lithographic projection apparatus comprising:
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a support structure for supporting a patterning device, the patterning device serving to pattern a projection beam according to a desired pattern;
a substrate table for holding a substrate;
a projection system for projecting the patterned beam onto a target portion of the substrate; and
a positioning system for positioning an object, selected from the group consisting of the support structure and the substrate table, said positioning system having a long stroke module and a short stroke module in series and a control system for controlling the long stroke and short stroke modules to move the positioned object along a desired course at desired speeds;
wherein said control system is adapted to control said long and short stroke modules to apply a desired acceleration to said object by controlling said short stroke module to apply said desired acceleration to said object and to control said long stroke module to apply a smaller acceleration. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A device manufacturing method comprising:
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projecting a patterned beam of radiation onto a target portion of the layer of radiation-sensitive material on a substrate; and
positioning at least one of the substrate and a patterning device used to pattern the beam with a positioning system comprising a long stroke and a short stroke module in series; and
accelerating the substrate or the patterning device by applying a higher acceleration with the sort stroke module than with the long stroke module.
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9. A machine readable medium comprising machine executable instructions for performing a method comprising:
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projecting a patterned beam of radiation onto a target portion of the layer of radiation-sensitive material on a substrate; and
positioning at least one of the substrate and a patterning device used to pattern the beam with a positioning system comprising a long stroke and a short stroke module in series; and
accelerating the substrate or the patterning device by applying a higher acceleration with the sort stroke module than with the long stroke module.
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Specification