In situ optical surface temperature measuring techniques and devices

• US 20040258130A1
• Filed: 05/05/2004
• Published: 12/23/2004
• Est. Priority Date: 04/20/2001
• Status: Active Grant

• Current Assignee: LumaSense Technologies Holdings, Inc. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Luxtron Corp. (Advanced Energy Industries, Inc. (China))
• Inventors: Gotthold, John P., Champetier, Robert, Stapleton, Terry M., Dang, Hung
• Granted Patent: US 7,080,940 B2
• Time in Patent Office: Days
• US Class Current: 374/208
• CPC Class Codes: G01J 1/28 using variation of intensity or distance of source G01J1/34 takes precedence
• CPC Class Codes: G01J 1/58 using luminescence generated by light
• CPC Class Codes: G01J 5/0003 for sensing the radiant heat transfer of samples, e.g. emittance meter
• CPC Class Codes: G01J 5/0007 of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/0205 Mechanical elements; Supports for optical elements
• CPC Class Codes: G01J 5/025 Interfacing a pyrometer to an external device or network; User interface
• CPC Class Codes: G01J 5/046 Materials; Selection of thermal materials
• CPC Class Codes: G01J 5/048 Protective parts
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0818 Waveguides
• CPC Class Codes: G01J 5/0821 Optical fibres
• CPC Class Codes: G01J 5/084 Adjustable or slidable
• CPC Class Codes: G01J 5/0887 Integrating cavities mimicking black bodies, wherein the heat propagation between the black body and the measuring element does not occur within a solid; Use of bodies placed inside the fluid stream for measurement of the temperature of gases; Use of the reemission from a surface, e.g. reflective surface; Emissivity enhancement by multiple reflections
• CPC Class Codes: G01J 5/0893 Arrangements to attach devices to a pyrometer, i.e. attaching an optical interface; Spatial relative arrangement of optical elements, e.g. folded beam path G01J5/049 takes precedence
• CPC Class Codes: G01K 1/14 Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
• CPC Class Codes: G01K 1/16 Special arrangements for conducting heat from the object to the sensitive element
• CPC Class Codes: G01K 11/20 using thermoluminescent materials G01K11/32 takes precedence
• CPC Class Codes: G01K 11/3206 at discrete locations in the fibre, e.g. using Bragg scattering
• CPC Class Codes: G01K 11/3213 using changes in luminescence, e.g. at the distal end of the fibres

Abstract

A temperature sensor that has a thermally conducting contact with a surface that emits electromagnetic radiation in proportion to the temperature of the contact is disclosed. The sensor has a resilient member attached to the contact and configured to extend the contact toward the object to be measured. A first light waveguide is attached to the contact and is configured to transmit the electromagnetic radiation from the contact. The sensor has a guide with a bore formed therein that the first waveguide is insertable into. When the contact is moved, the first waveguide moves within the bore. A second waveguide is attached to the guide such that a variable gap is formed between the ends of the first waveguide and the second waveguide. Electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide. The guide allows the first waveguide to move with the contact in order to ensure that the contact is fully engaged with the surface of the object.

Claims

1. A sensor for measuring the temperature of a surface of an object, comprising:

a cap having an end wall of thermally conducting material and shaped to conform to a shape of the object surface to be measured;

a surface on an inside of the end wall of the cap that emits electromagnetic radiation having a detectable optical characteristic that is functionally dependent on the temperature of the end wall;

a light waveguide disposed generally orthogonal to the cap and in optical communication therewith; and

a resilient member connected to the cap in a manner to urge the cap toward the surface of the object in a manner allowing a limited degree of directional freedom with respect to the waveguide, thereby causing the cap outside surface to firmly engage the object surface when positioned in contact therewith.

2. The sensor of claim 1 further comprising a light shield surrounding the waveguide.

3. The sensor of claim 2 further comprising a seal core attached to the light shield, the seal core being configured to allow the waveguide to pass therethrough;

4. The sensor of claim 3 further comprising an optical connector in optical communication with the optical waveguide and configured to transmit the electromagnetic radiation from the waveguide.

5. The sensor of claim 4 being configured to measure the temperature of a process selected from the group consisting of:

physical vapor deposition;

dielectric etching;

optical coating of glass substrates;

chemical vapor deposition;

metal organic vapor deposition;

low pressure chemical vapor deposition; and

atomic layer deposition.

6. The sensor of claim 1 wherein the electromagnetic radiation emitting surface includes a surface of a layer of luminescent material attached to an inside of the cap.

7. The sensor of claim 1 wherein the electromagnetic radiation emitting surface includes a surface of known emissivity that emits radiation within an infrared range.

8. The sensor of claim 1 wherein the end wall has a rounded edge to facilitate thermal contact with the object surface.

9. A sensor for measuring the temperature of an object, the sensor comprising:

a thermally conducting contact having a surface that emits electromagnetic radiation with a detectable optical characteristic that is functionally dependent on the temperature of the contact;

a resilient member attached to the contact and configured to extend the contact toward the object;

a first light waveguide attached to the contact and configured to transmit the electromagnetic radiation from the contact;

a guide having a bore through which the first waveguide is insertable into, such that when the contact is moved, the first waveguide is movable within the bore; and

a second light waveguide fixedly attached to the guide, the second light waveguide positioned to form a variable gap between an end of the first waveguide and an end of the second waveguide such that electromagnetic energy from the first waveguide traverses the gap and can be transmitted by the second waveguide.

10. The sensor of claim 9 further comprising a shield attached to the guide and surrounding the resilient member and the first waveguide.

11. The sensor of claim 9 further comprising an extension attached to the guide and surrounding the second waveguide.

12. The sensor of claim 11 further comprising a base attached to the extension for attaching the temperature sensor to a mount.

13. The sensor of claim 12 further comprising a keeper for securing the base to the mount.

14. The sensor of claim 12 further comprising a ferrule in optical communication with the second waveguide and attached to the base, the ferrule being configured to transmit the optical radiation emitted from the second waveguide.

15. The sensor of claim 9 being configured to measure the temperature of a process selected from the group consisting of:

physical vapor deposition;

dielectric etching;

optical coating of glass substrates;

chemical vapor deposition;

metal organic vapor deposition;

low pressure chemical vapor deposition; and

atomic layer deposition.

16. The sensor of claim 9 wherein the electromagnetic radiation emitting surface includes a surface of a layer of luminescent material attached to an inside of the cap.

17. The sensor of claim 9 wherein the electromagnetic radiation emitting surface includes a surface of known emissivity that emits radiation within an infrared range.

18. The sensor of claim 9 wherein the contact has an end wall with a rounded edge to facilitate contact with the surface of the object.

19. A sensor for measuring the temperature of an object, the sensor comprising:

a thermally conducting contact having a surface that emits electromagnetic radiation with a detectable optical characteristic that is functionally dependent on the temperature of the contact;

a tip attached to the contact, the tip having an barrel section and a mating section;

a shield having an opening with an annular edge formed in an end thereof, the opening being configured such that the barrel portion passes therethrough and the annular edge being shaped complementary to the mating section of the tip;

a resilient member attached to the contact and configured to extend the barrel portion through the opening and extend the contact toward the object; and

a light waveguide disposed within the tip and configured to transmit the electromagnetic radiation emitted from the surface of the contact;

wherein the opening and the ledge allow a limited degree of directional freedom of the tip to thereby provide engagement between the contact and the object.

20. The sensor of claim 19 further comprising a fiber guide configured to secure the waveguide within the shield.

21. The sensor of claim 19 being configured to measure the temperature of a process selected from the group consisting of:

physical vapor deposition;

dielectric etching;

optical coating of glass substrates;

chemical vapor deposition;

metal organic vapor deposition;

low pressure chemical vapor deposition; and

atomic layer deposition.

22. The sensor of claim 19 wherein the electromagnetic radiation emitting surface includes a surface of a layer of luminescent material attached to an inside of the cap.

23. The sensor of claim 19 wherein the electromagnetic radiation emitting surface includes a surface of known emissivity that emits radiation within an infrared range.

24. The sensor of claim 19 wherein the contact has an end wall with a rounded edge to facilitate contact with the surface of the object.