Electrode configuration for piano MEMs micromirror
First Claim
1. A micro-electro-mechanical device mounted on a substrate comprising:
- a pivoting member pivotally mounted on said substrate about first and second axes, said pivoting member including a first and a second supporting region on opposite sides of said first axis;
a first hinge extending from said substrate rotatable about the first axis;
a gimbal ring surrounding said first hinge;
a second hinge extending from said gimbal ring to said pivoting member rotatable about the second axis;
a first electrode beneath the first supporting region for pivoting the pivoting member about the first axis;
a second electrode beneath the second supporting region for pivoting the pivoting member about the first axis; and
a third electrode beneath a portion of said pivoting member along the first axis, adjacent said second hinge.
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Abstract
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes.
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Citations
19 Claims
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1. A micro-electro-mechanical device mounted on a substrate comprising:
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a pivoting member pivotally mounted on said substrate about first and second axes, said pivoting member including a first and a second supporting region on opposite sides of said first axis;
a first hinge extending from said substrate rotatable about the first axis;
a gimbal ring surrounding said first hinge;
a second hinge extending from said gimbal ring to said pivoting member rotatable about the second axis;
a first electrode beneath the first supporting region for pivoting the pivoting member about the first axis;
a second electrode beneath the second supporting region for pivoting the pivoting member about the first axis; and
a third electrode beneath a portion of said pivoting member along the first axis, adjacent said second hinge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of rotating a micro electromechanical (MEMs) device about a first axis from a first position to a second position, while bypassing a third position therebetween, comprising the steps of:
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a) providing a pivoting member pivotally mounted above a substrate about the first axis and a second axis;
b) providing first and second electrodes on opposite sides of the first axis underneath the pivoting member;
c) providing a third electrode along the first axis;
d) gradually decreasing voltage to the first electrode, while gradually increasing voltage to the third electrode for rotating the pivoting member about the first axis away from the first position and for rotating the pivoting member about the second axis, respectively; and
e) gradually decreasing voltage to the third electrode, while gradually increasing voltage to the second electrode for rotating the pivoting member about the second axis and for rotating the pivoting member to the second position, respectively. - View Dependent Claims (17, 18, 19)
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Specification