Coated object
First Claim
Patent Images
1. A coated object, comprising:
- a substrate having at least one functional layer; and
at least one interlayer being arranged in said at least one functional layer, said at least one interlayer having a layer thickness of less than or equal to 10 nm, interrupting the morphology of said at least one functional layer, and dividing said at least one functional layer in a plurality of partial layers.
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Abstract
The invention relates to a coated object in which coatings remain of a constant and unchanged high quality despite operating temperatures of more than 350° C. This is achieved with interlayers which deliberately interrupt and thereby stabilize the morphology of the coating.
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Citations
75 Claims
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1. A coated object, comprising:
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a substrate having at least one functional layer; and
at least one interlayer being arranged in said at least one functional layer, said at least one interlayer having a layer thickness of less than or equal to 10 nm, interrupting the morphology of said at least one functional layer, and dividing said at least one functional layer in a plurality of partial layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60)
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45. The coated object as claimed in 43, wherein the coating object is useable as a carrier element for lithographic processes.
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61. A coated object, comprising:
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a substrate having at least one functional layer; and
at least one interlayer, which is different than said at least one functional layer, being arranged in said at least one functional layer, said at least one interlayer having the same refractive index as said at least one functional layer and said at least one interlayer forming a layer that interrupts the morphology of said at least one functional layer. - View Dependent Claims (62, 63, 64, 65)
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66. A coated object, comprising:
a substrate having at least one optical functional layer, said at least one optical functional layer having a layer thickness between 20 and 1,000 nm, having a predominantly amorphous layer, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one optical functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one optical functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 10 and 50 nm.
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67. A coated object, comprising:
a substrate having at least one optical functional layer, said at least one optical functional layer having a layer thickness between 20 and 1,000 nm, having a predominantly crystalline layer in a thermally instable crystal phase, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one optical functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one optical functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 10 and 50 nm.
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68. A coated object, comprising:
a substrate having at least one protective functional layer, said at least one protective functional layer having a layer thickness between 100 and 20,000 nm, having a predominantly crystalline layer in a thermally stable crystal phase, and having at least one interlayer arranged therein, said at least one interlayer having a different morphology than said at least one protective functional layer, having a layer thickness less than or equal to 10 nm, and dividing said at least one protective functional layer in a plurality of partial layers so that said plurality of partial layers have a layer thickness between 30 and 500 nm.
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69. A diffusion-inhibiting container, comprising:
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a substrate;
a functional layer disposed on said substrate; and
an interlayer arranged in said functional layer, wherein said interlayer has a layer thickness of less than or equal to 10 nm, interrupts the morphology of said functional layer, and divides said functional layer in a plurality of partial layers.
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70. A process for producing a coated object, comprising:
using a CVD or PVD process to apply a coating to a substrate, said coating having at least one functional layer and at least one interlayer arranged in said at least one functional layer, said at least one interlayer having a layer thickness of less than or equal to 10 nm, interrupting the morphology of said at least one functional layer, and dividing said at least one functional layer in a plurality of partial layers. - View Dependent Claims (71, 72, 73, 74, 75)
Specification